预拉伸量对倾斜溅射制备的柔性CoFeB薄膜性能的影响  

Anisotropy and high frequency magnetic properties of flexible CoFeB films with periodic wrinkled surface mprphology

作　　者：刘健[1] LIU Jian(School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学物理与电子科学学院,上海200241

出　　处：《磁性材料及器件》2021年第5期17-22,共6页Journal of Magnetic Materials and Devices

摘　　要：通过在单向预拉伸开的聚二甲基硅氧烷(PDMS)上倾斜溅射CoFeB获得柔性CoFeB薄膜,采用光学显微镜、原子力显微镜(AFM)、振动样品磁强计(VSM)、矢量网络分析仪等表征其结构形貌和磁性能。结果表明,柔性CoFeB薄膜具有周期性的褶皱表面形貌,其横切面类似于正弦曲线,可用正弦曲线的波长和振幅来对薄膜的表面形貌进行描述。同时,该薄膜表现出单轴磁各向异性,易磁化方向垂直于预拉伸方向,且各向异性场的大小与预拉伸量相关。该磁各向异性来自于周期性的表面形貌和倾斜溅射。此外,该薄膜具有优良的高频磁性能,其起始磁导率和铁磁共振频率都与预拉伸量相关。这种具有周期性表面形貌的柔性CoFeB薄膜有望应用于柔性微波磁性器件中。The flexible CoFeB films were fabricated by oblique sputtering CoFeB onto unidirectional prestretched polydimethylsiloxane(PDMS).The surface morphology and magnetic properties were characterized by optic microscope,atomic force microscope(AFM),vibrating sample magnetometer and vector network analyzer.According to the result,the flexible CoFeB films possess periodic wrinkled surface morphology,and its cross section is similar to sinusoidal curve.The surface morphology of the thin film can be described by the wavelength and amplitude of sinusoidal curve.Meanwhile,the films show uniaxial magnetic anisotropy,and the easy magnetization direction are perpendicular to the prestretching direction,and the magnitude of the anisotropy field is related to the pre-strain.The magnetic anisotropy comes from the anisotropy caused by periodic surface topography and anisotropy caused by oblique sputtering.In adition,the films possess excellent high frequency magnetic properties,and its initial permeability and ferromagnetic resonance frequency are related to the pre-strain.This kind of flexible CoFeB thin films with periodic surface morphology are expected to be used in flexible microwave magnetic devices.

关 键 词：柔性磁性薄膜 周期性褶皱表面形貌 磁各向异性 高频磁性能 

分 类 号：O484.43[理学—固体物理]