An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system  

作　　者：Bo ZHAO Weijia SHI Bingquan WANG Jiubin TAN 

机构地区：[1]Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China [2]Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China

出　　处：《Frontiers of Information Technology & Electronic Engineering》2021年第10期1390-1401,共12页信息与电子工程前沿（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(No.51975160)。

摘　　要：In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping(the frequency is between 0 Hz and the natural frequency).In this paper,an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system(DSASAVIS)is proposed.This system has a significant anti-resonance characteristic;that is,the vibration amplitude can drop to nearly zero at a particular frequency,which is called the anti-resonance frequency.The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic.Experimental results show that the closed-loop transmissibility is less than−15 dB from 0 Hz to the initial anti-resonance frequency.Furthermore,it is less than−30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller.With the proposed controller,the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5%for the impulse disturbance applied to the platform base.Simultaneously,the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances,and a good vibration isolation performance is achieved.This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment,especially at frequency sweeping in the semiconductor manufacturing industry.

关 键 词：Semi-active vibration isolation Dual-stage actuation Dynamic vibration absorption Adjustable anti-resonance frequency controller 

分 类 号：TB53[理学—物理]