电子级Ⅲ族金属有机化合物的制备与应用进展  

The Progress in Preparation and Application of Electronic Grade Ⅲ Metal Organic Compounds

作　　者：陈飞彪[1] 谢贤清[2] 刘德永[2] 郭晓红[2] CHEN Feibiao;XIE Xianqing;LIU Deyong;GUO Xiaohong(College of Chemistry and Chemical Engineeering,Jiangxi Normaol University,Nanchang Jiangxi 330022,China;National Monosaccharide Chemical Synthesis Engineering Technology Research Center,Jiangxi Normal University,Nanchang Jiangxi 330022,China)

机构地区：[1]江西师范大学化学化工学院,江西南昌330022 [2]江西师范大学国家单糖化学合成工程技术研究中心,江西南昌330022

出　　处：《江西师范大学学报（自然科学版）》2021年第4期426-431,共6页Journal of Jiangxi Normal University(Natural Science Edition)

基　　金：国家重点研发计划(2017YFB0307803);江西省教育厅青年课题(170217)资助项目。

摘　　要：该文介绍了Ⅱ族、Ⅲ族金属有机化合物的合成方法、性质及其应用领域,特别对当前应用广泛的电子级Ⅲ族金属有机化合物的提纯方法做了系统介绍,指出目前电子级Ⅲ族金属有机化合物在应用过程中存在的不足及需改进的方向.重点阐述了迭氮类Ⅲ族金属有机化合物在MOCVD技术的未来应用中的优势及其研究进展,展望了电子级Ⅲ族金属有机化合物对于促进半导体技术科技进步的重要意义和需要进一步研究发展的方向.The synthetic methods,properties and application fields of the metal organic compounds of the second and third ethnic groups are introduced,and the purification methods of the electronic gradeⅢmetal organic compounds,which are widely used at present,are systematically studied.The shortcomings and improvement directions of electronic gradeⅢmetal organic compounds are pointed out.The advantages and research progress of azideⅢmetal organic compounds in the future application of MOCVD technology are emphasized.Finally,the importance of electronic gradeⅢmetal organic compounds in promoting the technological progress of semiconductor technology is prospected,and the direction for further research and development is also pointed out.

关 键 词：电子级金属有机化合物 制备方法 化合物半导体 配合物提纯技术 

分 类 号：O627.3[理学—有机化学]