基于光谱共焦位移传感器的零件几何量精密测量  

Precision measurement of part geometry based on spectral confocal displacement sensor

作　　者：曾德强 ZENG Deqiang(China Aviation Development Guizhou Liyang Aviation Power Co.,Ltd,Guiyang Guizhou,551100,China)

机构地区：[1]中国航发贵州黎阳航空动力有限公司,贵阳551100

出　　处：《自动化与仪器仪表》2021年第10期232-235,共4页Automation & Instrumentation

基　　金：贵州省教育厅青年科技人才成长项目(No.教合UC字201556249)。

摘　　要：为提高零件几何量精密测量的准确性,设计一个基于光谱共焦位移传感器的零件几何量精密测量方法。首先提出光谱共焦位移传感器的工作原理,利用其工作原理开展测量工作,然后确定被测物允许的最大倾斜角度,最后通过质心法与抛物线拟合法实现零件几何量精密测量。实验对比结果表明,此次研究的基于光谱共焦位移传感器的零件几何量精密测量方法有效提高了零件几何量精密测量的准确性,并减少了测量时间,实际应用意义较强。in order to improve the accuracy of precision measurement of part geometry, a precision measurement method of part geometry based on spectral confocal displacement sensor is designed. Firstly, the working principle of spectral confocal displacement sensor is proposed, and the measurement work is carried out based on the working principle. Then, the maximum allowable tilt angle of the measured object is determined. Finally, the geometric precision measurement of parts is realized through the centroid method and parabolic fitting method. The experimental results show that the precision measurement method based on spectral confocal displacement sensor can effectively improve the accuracy of precision measurement and reduce the measurement time.

关 键 词：光谱共焦 位移传感器 最大倾斜角 光谱共焦信号峰值波长 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置] TG661[自动化与计算机技术—控制科学与工程]