基于还原氧化石墨烯材料的电阻式湿度传感器  

Resistive Humidity Sensor Based on Reduced Graphene Oxide Materials

作　　者：雷程[1] 张君娜 刘瑞芳 梁庭[1] 赵珠杰 齐蕾 Lei Cheng;Zhang Junna;Liu Ruifang;Liang Ting;Zhao Zhujie;Qi Lei(Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;Northern Automatic Control Technology Institute,Taiyuan 030006,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]北方自动控制技术研究所,太原030006

出　　处：《微纳电子技术》2021年第11期992-997,共6页Micronanoelectronic Technology

基　　金：山西省自然科学基金资助项目(201801D221203);高等学校科技创新项目(1810600108MZ)。

摘　　要：设计并制备了一种基于还原氧化石墨烯(RGO)材料的电阻式湿度传感器,该湿度传感器的关键部分采用叉指电极结构,它是利用沉积、光刻、溅射和剥离等微电子机械系统(MEMS)工艺制备而成,湿敏材料是由一定比例的RGO粉末和分散剂经过超声波分散配置成均匀分散的水溶液,叉指电极与湿敏材料通过滴涂方法有效结合,并进行了相关的测试。结果显示,在环境湿度为38.4%RH~97.7%RH时,湿度变化量与电阻变化量的线性相关度高达0.97279,传感器的灵敏度约为0.45791Ω/%RH。在环境湿度为38.4%RH~55.1%RH时,传感器的响应时间为9 s、恢复时间为12 s,多次测试结果显示其具有良好的稳定性与重复性。A resistive humidity sensor based on reduced graphene oxide(RGO)materials was designed and prepared.The key part of the humidity sensor adopts the interdigital electrode structure.The humidity sensor was prepared by using micro-electromechanical system(MEMS)processes,such as deposition,lithography,sputtering and lift-off and so on.The humidity sensitive material is a uniformly dispersed aqueous solution with a certain proportion of RGO powder and dispersant dispersed by ultrasonic wave.The interdigital electrode and the humidity sensitive material were effectively combined by drop coating method,and the related testresults were conducted.The results show that the linear correlation between the humidity variation and resistance variation is as high as 0.97279 in the ambient humidity of 38.4%RH-97.7%RH,and the sensitivity of the sensor is about 0.45791Ω/%RH.The response time of the sensor is 9 s and the recovery time is 12 s in the ambient humidity of 38.4%RH-55.1%RH.Several test results show that the humidity sensor has excellent stability and repeatability.

关 键 词：还原氧化石墨烯(RGO) 微电子机械系统(MEMS) 电阻式湿度传感器 叉指电极 湿敏材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]