基于聚酰亚胺薄膜的柔性Cu-Ni热电堆的制备与性能  

Preparation and Performance of Flexible Cu-Ni Thermopile Based on the Polyimide Film

作　　者：邱霁玄 王佩英 王欢 张成功 李以贵 Qiu Jixuan;Wang Peiying;Wang Huan;Zhang Chenggong;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2021年第11期1030-1034,1045,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号);上海“联盟计划”资助项目(LM201929)。

摘　　要：基于塞贝克原理,在聚酰亚胺薄膜上采用溅射、光刻和剥离工艺制成由78对Cu-Ni热电偶组成的闭合回路热电堆,可满足人体穿戴设备对灵活性与集成性的要求。进一步将热电堆使用波形模具成型为波浪形,成型后在上下表面分别覆盖石墨层。热电堆长66 mm,宽38 mm,高2.5 mm。测试时上表面与空气接触用于散热,下表面与人体皮肤接触用于吸热。在人体手腕处佩戴,规律性上下摆动,测得周期性输出电压最大值为1.74 mV。将波浪形柔性Cu-Ni热电堆以不同的曲率半径弯折并进行测试,结果表明:柔性Cu-Ni热电堆平展时输出电压随温差变化最大,为15.7 mV/K,约为理论输出电压的75%。Cu-Ni热电堆灵活性强,灵敏度高,可实际应用于柔性可穿戴设备。Based on the Seebeck principle,a closed loop thermopile composed of 78 pairs of Cu-Ni thermocouples was fabricated by sputtering,lithography and lift-off processes on the polyimide film,which could meet the requirements of human body wearable devices for flexibility and integration.The thermopile was further formed into a wave shape using a wave mold,and the upper and lower surfaces were covered with graphite layers after forming,respectively.The thermopile has a length of 66 mm,a width of 38 mm and a height of 2.5 mm.During the test,the upper surface is in contact with air for heat dissipation,and the lower surface is in contact with human skin for heat absorption.Wearing on the human wrist,it swings up and down regularly,and the maximum value of the measured periodic output voltage is 1.74 mV.The wavy flexible Cu-Ni thermopile was bent into different radii of curvature and tested.The results show that the output voltage of the flexible Cu-Ni thermopile varies the most with the temperature difference when it is flattened,which is 15.7 mV/K,and the actual output voltage is about 75%of the theoretical output voltage.The Cu-Ni thermopile has strong flexibility and high sensitivity,and can be practically used in flexible wearable devices.

关 键 词：微电子机械系统(MEMS) 热电堆 人体穿戴设备 柔性材料 石墨 

分 类 号：TH703[机械工程—仪器科学与技术]