元素掺杂对类金刚石薄膜摩擦学性能的影响  

Effect of Element Doping on the Tribological Properties of Diamond-like Carbon Films

作　　者：郭培林 贾倩 孟树文 刘广桥 赖振国 文欣宇 张斌[3] GUO Peilin;JIA Qian;MENG Shuwen;LIU Guangqiao;LAI Zhenguo;WEN Xinyu;ZHANG Bin(School of Materials Science and Engineering,Lanzhou Jiaotong University,Lanzhou 730070,China;Bailie School of Mechanical Engineering,Lanzhou City University,Lanzhou 730070,China;Key Laboratory of Wear and Protection of Materials,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;China National Nuclear Industry Corporation 404,Jiayuguan 735100,China)

机构地区：[1]兰州交通大学材料科学与工程学院,兰州730070 [2]兰州城市学院培黎机械工程学院,兰州730070 [3]中国科学院兰州化学物理所材料磨损与防护重点实验室,兰州730000 [4]中核四〇四有限公司,嘉峪关735100

出　　处：《中国表面工程》2021年第4期19-29,共11页China Surface Engineering

基　　金：国家自然科学基金(U1737213,51865025);甘肃省自然科学基金(18JR3RA218);兰州市科技计划(2018-4-32)资助项目。

摘　　要：类金刚石碳薄膜具有良好的润滑性能,摩擦界面的磨屑或摩擦层结构影响其摩擦行为。掺杂的类金刚石碳薄膜是一个重要类别,其特征在于在非晶碳结构中结合不同的元素,改善其力学、摩擦学、电化学等性能。报告了不同非金属及金属元素的掺杂对类金刚石碳薄膜性能的影响,讨论了摩擦学性能随其化学组成和微观结构的变化,尽可能获得其间的一般趋势或相关性,并对元素掺杂类金刚石薄膜的发展进行了展望。Diamond-like carbon film has good lubricating properties,and the wear debris or tribo-layer structure at the friction interface affect the friction behavior.Doped diamond-like carbon film is an important category,which is characterized by combining different elements with the structure of amorphous carbon to improve its mechanical,tribological,electrochemical and other properties.The effects of incorporation of different non-metals and metal elements on the mechanical properties of diamond-like carbon films are reported.The tribological properties are discussed to obtain the general trend or correlation based on their chemical composition.Finally,the development of element-doped diamond-like carbon films is prospected.

关 键 词：类金刚石碳薄膜 元素掺杂 磨损 摩擦 内应力 

分 类 号：TG174[金属学及工艺—金属表面处理] TB321[金属学及工艺—金属学]