油污对热膜式气体流量传感器测量精度影响研究  

The effect of oil stain on measurement accuracy of the hot-film airflow sensor

作　　者：王杨 孙中圣[1] 袁昌荣[1] 李小宁[1] Wang Yang;Sun Zhongsheng;Yuan Changrong;Li Xiaoning(School of Mechanical Engineering,Nanjing University of Science and Technology,Jiangsu Nanjing,210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《机械设计与制造工程》2021年第10期90-94,共5页Machine Design and Manufacturing Engineering

基　　金：国家自然科学基金资助项目(51475242)。

摘　　要：为探究油污对热膜式气体流量传感器测量精度的影响,建立了传感器内部流道的三维几何模型以及基于厚度和位置分布的油污模型,仿真分析了不同流量条件下油污厚度和位置对传感器测量值的影响。进行了分阶段油污自然沉积试验,分析了各油污污染阶段传感器精度的变化。仿真和实验结果表明:油污沉积在传感器芯片中间电阻上时,对传感器测量精度的影响显著,随着油污厚度的增加,传感器的测量误差逐渐增大。The measurement accuracy of hot film gas flow sensor would be seriously affected when the oil in the air accumulates on the surface of the chip.A three-dimensional geometric model of the internal path of the sensor and the finite model of the oil contamination based on the thickness and position are established.The influences of oil contamination on measurement accuracy are analyzed on the condition of different velocities.The oil pollution deposition experiment is carried out in stages to verify the conclusion of the simulation analysis.The results show that the oil deposited on the resistance of the chip has a significant impact on the measurement accuracy.The measurement accuracy of the sensor decreases with the thickness of the oil deposition increasing.

关 键 词：热膜式气体流量传感器 油污沉积 测量精度 

分 类 号：TH138[机械工程—机械制造及自动化]