电磁式扫描光栅微镜设计  

Design of electromagnetic scanning grating micromirror

作　　者：周颖 黄云彪 李东玲[2] 温泉 ZHOU Ying;HUANG Yun-biao;LI Dong-ling;WEN Quan(Chongqing Chuanyi Automation Co.,Ltd.,Chongqing 401121,China;Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China,Chongqing University,Chongqing 400030,China)

机构地区：[1]重庆川仪自动化股份有限公司,重庆401121 [2]重庆大学光电技术及系统教育部重点实验室,重庆400030

出　　处：《光学精密工程》2021年第9期2048-2057,共10页Optics and Precision Engineering

基　　金：国家重点研发计划资助项目(No.2018YFF01011200)。

摘　　要：扫描光栅微镜是微型光谱仪的新一代核心分光器件。基于固定光栅分光的微型光谱仪由于采用阵列探测器在近红外波段价格昂贵,严重制约了近红外光谱分析技术的推广应用。本文提出了一种电磁式扫描光栅微镜,该器件采用微纳加工工艺,集光栅、驱动结构、角传感器于一体,可实现单管探测器替代阵列探测器。建立了电磁式扫描光栅微镜的理论模型,分析了梁尺寸、镜面尺寸等主要结构参数对器件性能指标的影响,获得器件的设计参数。使用微纳加工方法制作电磁式扫描光栅微镜芯片,并测试了性能指标。实验与理论结果表明:当器件扫描角度为±7°,光谱达800~2 500nm,闪耀波长附近的衍射效率≥70%,角传感器的控制精度≤0.05°,为应用于微型近红外光谱仪提供了一种有效方案。Scanning grating micromirror is a new generation core diffraction component of micro spectrom-eter. However,due to using of linear sensor which is too expensive in near infrared,the application of near infrared spectrum analysis technology is seriously restricted. In this paper,we present an electromagnetic scanning grating micromirror which is fabricated by Micro-Electro-Mechanical System(MEMS)technology. This device integrates with grating,driving actuator and angle sensor. It can replace array detectors with single detector. First,we design the theoretical model,and analyse the impact of main structural parameters such as beam size and mirror size on device performance. Based on these,the optimized design parameters for scanning grating micromirror are obtained. Subsequently,we fabricate this device by MEMS technology and test its performance. The experimental and theoretical results show that when the scanning angle is ±7°,the spectral range is 800-2 500 nm,the diffraction efficiency near the blazed wavelength is ≥70%,and the control precision of angle sensor is ≤ 0. 05°,This result demonstrates that the using of our device in micro spectrometer is effective.

关 键 词：微纳器件 扫描光栅微镜 电磁式 角传感器 近红外 

分 类 号：TN214[电子电信—物理电子学] TH741[机械工程—光学工程]