基于微结构的柔性压力传感器设计、制备及性能  

Design, fabrication and performance of flexible pressure sensors based on microstructures

作　　者：金凡 吕大伍 张天成 沈文锋[2] 李佳[2] 谭瑞琴[1] JIN Fan;LV Dawu;ZHANG Tiancheng;SHEN Wenfeng;LI Jia;TAN Ruiqin(Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,China;Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]宁波大学信息科学与工程学院,宁波315211 [2]中国科学院宁波材料技术与工程研究所,宁波315201

出　　处：《复合材料学报》2021年第10期3133-3150,共18页Acta Materiae Compositae Sinica

基　　金：浙江省公益技术研究计划(LGG21F040001);宁波市自然科学基金(202003N4362;2018A610073;202003N4332);宁波大学王宽诚基金。

摘　　要：随着科技的快速发展,电子皮肤和柔性可穿戴设备由于在人体运动、健康监测、智能机器人等领域具有重要应用而引起了人们广泛的关注。传统的基于贵金属或金属氧化物半导体的压力传感器成本高、柔韧性差,而新型的基于微结构的柔性压力传感器具有灵敏度高、应变范围宽、低成本、低功耗、响应速度快等优势,在电子皮肤和柔性可穿戴设备等方面发挥重要作用,成为当前柔性电子材料与器件主要研究热点之一。本文系统总结了近年来颇受关注的基于金字塔形、微球形、微柱形、仿生结构、褶皱等不同柔性基底微结构和多孔导电聚合物材料的柔性压力传感器在材料选择、结构设计、制备方法、传感性能等方面取得的重要进展,并对柔性压力传感器的未来发展进行了展望。With the rapid development of science and technology, electronic skin and flexible wearable devices have attracted wide attention because of their important applications in human motion, health monitoring, intelligent robots and other fields. The traditional pressure sensors based on noble metal or metal oxide semiconductor have high cost or poor flexibility, while the flexible pressure sensors based on microstructures have the advantages of high sensitivity, wide strain range, low cost, low power consumption and fast response, which play an important role in electronic skin and flexible wearable devices and have become one of the main research hotspots of materials and devices in flexible electronics. This review systematically summarizes the important progress made in the material selection, structural design, preparation methods and sensing performance of flexible pressure sensors based on different flexible substrate microstructures such as pyramid, microsphere, micro-column, bionic structure and fold and porous conductive polymer materials. Finally, the future development of flexible pressure sensors is prospected.

关 键 词：可穿戴器件 柔性压力传感器 导电聚合物 功能纳米复合材料 微结构 

分 类 号：O69[理学—化学] TB33[一般工业技术—材料科学与工程]