大气压非平衡等离子体诊断:激光散射  

Non-equilibrium Atmospheric Pressure Plasma Diagnostic:Laser Scattering

作　　者：卢新培[1] 吴帆 谭笑 LU Xinpei;WU Fan;TAN Xiao(School of Electrical and Electronic Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;State Grid Jiangsu Electric Power Co.,Ltd.Research Institute,Nanjing 211100,China)

机构地区：[1]华中科技大学电气与电子工程学院,武汉430074 [2]国网江苏省电力有限公司电力科学研究院,南京211100

出　　处：《高电压技术》2021年第10期3684-3695,共12页High Voltage Engineering

基　　金：国家自然科学基金(51907029,51625701,51977096)。

摘　　要：大气压非平衡等离子体在表面改性和杀菌消毒等领域等具有广泛的应用。为了增强对其物理机制的理解,电子数密度和温度、气体动力学温度和分子转动温度等关键参数的测量必不可少。激光散射是对这些参数进行诊断的常用技术,该文将针对大气压非平衡等离子体诊断中的激光散射诊断进行了较为详细的评述。首先对瑞利散射、汤姆逊散射和拉曼散射这3种类型的激光散射进行了基本的介绍,推导了相应的计算式。随之总结归类了目前已报道过的3种的散射诊断策略,分别为:三光栅光谱仪、布拉格光栅滤波器和物理掩膜结合单光谱仪结构,并对这3种诊断策略的优缺点进行了归纳。分析讨论了近些年散射诊断应用在大气压非平衡等离子体中的研究成果,讨论了激光散射的研究方向。基于此凝练了激光散射在大气压非平衡等离子体中实现成功诊断的核心技术问题,这对拓展激光散射在等离子体诊断中的应用范围具有一定的指导意义。Non-equilibrium atmospheric pressure plasma has a wide range of applications in the fields of surface modification and sterilization.In order to enhance the understanding of its physical mechanism,the measurement of key parameters such as electron density and temperature,gas dynamics temperature and molecular rotation temperature is essential.Laser scattering is a common technique for measuring these parameters.This paper will give a detailed review of laser scattering diagnosis in non-equilibrium atmospheric pressure plasma diagnosis.First,three types of laser scattering,namely,Rayleigh scattering,Thomson scattering and Raman scattering,are introduced.And the corresponding calculation formulas are derived.Then,the three kinds of scattering diagnosis strategies that have been reported so far,namely,three grating spectrometers,Bragg grating filter and physical mask combined with a single spectrometer structure,are summarized and categorized.The advantages and disadvantages of these three diagnostic strategies are analyzed.The research results of the application of scattering diagnostics in non-equilibrium atmospheric pressure plasma in recent years are analyzed and discussed,and the research direction of laser scattering is discussed.Based on this,the core technical issues for successful diagnosis of laser scattering in atmospheric non-equilibrium plasma are discussed,which has certain guiding significance for expanding the application scope of laser scattering in plasma diagnosis.

关 键 词：大气压非平衡等离子体 气体放电 等离子体诊断 激光散射光谱 电子数密度 

分 类 号：O53[理学—等离子体物理]