欧洲计量研究计划对中国微电子计量技术发展的借鉴  

Reference of European Metrology Research Programme to the Development of China’s Microelectronic Metrology

作　　者：李雷 张慧 张红[1] 沙长涛[1] LI Lei;ZHANG Hui;ZHANG Hong;SHA Chang-tao(China Electronics Standardization Institute,Beijing 100176,China)

机构地区：[1]中国电子技术标准化研究院,北京100176

出　　处：《宇航计测技术》2021年第5期92-96,共5页Journal of Astronautic Metrology and Measurement

摘　　要：微电子技术作为一种新兴的技术,是当今世界电子信息产业的核心之一。随着微电子技术的迅猛发展,对我国微电子计量技术发展提出了更高要求。欧盟自2009年起,开始了针对纳米、通信、先进制造等领域的计量研究计划(EMRP),以保证欧盟在政治、经济上的先进性。在信息时代高速发展的背景下,跟踪和研究欧洲计量研究计划中与微电子计量相关的研究,借鉴欧盟先进的微电子计量建设经验,对中国微电子计量技术跨越式发展有重要的研究意义。As an emerging technology,microelectronics technology is one of the cores of the world ’s electronic information industry. With the rapid development of microelectronics technology,higher requirements are put forward for the development of microelectronics metrology technology in China. Since 2009,the European Union has started the European Metrology Research Program( EMRP) in the fields of nanotechnology,communications,and advanced manufacturing to ensure the political and economic advancement of the European Union. Against the background of rapid development in the information age,tracking and studying the research related to microelectronic metrology in the European Metrology Research Program,and learning from the European Union ’s advanced microelectronic metrology construction experiences,have important research significance for the leap-forward development of microelectronic metrology in China.

关 键 词：计量 微电子 欧洲计量研究计划 

分 类 号：TN98[电子电信—信息与通信工程]