同步辐射用36单元压电变形镜研制及其面形调控研究  

Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability

作　　者：袁德波 许亮[2] 张文斌[3] 周志勇[3] 董晓浩 刘正坤[1] 张国斌[1] YUAN De-bo;XU Liang;ZHANG Wen-bin;ZHOU Zhi-yong;DONG Xiao-hao;LIU Zheng-kun;ZHANG Guo-bin(National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China;Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710119,China;Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China)

机构地区：[1]中国科学技术大学国家同步辐射实验室,安徽合肥230029 [2]中国科学院西安光学精密机械研究所,陕西西安710119 [3]中国科学院上海硅酸盐研究所,上海200050 [4]中国科学院上海高等研究院,上海201204

出　　处：《中国光学》2021年第6期1362-1367,共6页Chinese Optics

基　　金：国家重点研发计划(No.2016YFA0401004)。

摘　　要：第4代同步辐射光源及自由电子激光装置中束线光学系统对光学元件性能提出了苛刻的要求。使用压电变形镜是实现超高面形精度调控和实施波前补偿的有效途径,也是目前亟需突破的国产化技术瓶颈。针对这一问题,研制了长度为200 mm、含36个单元压电促动器的压电变形镜。通过数值模拟优化了变形镜结构参数,利用国产工艺完成了变形镜样机的制作,并对其面形调控能力进行初步探究。测试结果表明:所研制变形镜样机的平面面形误差可降低至1.38 nm(rms),斜率误差降低至240 nrad(rms),实现了平面面形的nm级调控。Ultra-high quality optical elements are demanded by beamlimes on fourth-generation synchrotron facilities and free-electron laser facilities.A bimorph mirror is effectively used to achieve ultra-high-preci-sion surface profile control and wavefront correction,yet it’s one of the bottlenecks of domestic techniques and must be overcome.In order to accomplish this,a 200 mm long bimorph mirror with 36 elements of piezoelectric actuators was developed.The structure parameters of the bimorph mirror were optimized by numerical simulation,and the bimorph mirror was fabricated by domestic technology.The test results show that the surface profile error and slope error of the bimorph mirror can be reduced to 1.38 nm(rms)and 240 nrad(rms),thus the nanoscale control of the mirror surface profile was realized.

关 键 词：压电变形镜 面形误差 同步辐射 自适应光学 

分 类 号：TN384[电子电信—物理电子学] O434[机械工程—光学工程]