拉曼光谱仪成像定位精度检测方法  

The Method for Measuring the Positioning Accuracy of Confocal Raman Microscope

作　　者：定翔[1] 付彦哲 李飞[1] 刘文丽[1] DING Xiang;FU Yan-zhe;LI Fei;LIU Wen-li(National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量学报》2021年第10期1271-1274,共4页Acta Metrologica Sinica

基　　金：国家重点研发计划NQI专项(2016YFF0201005)。

摘　　要：激光共焦拉曼光谱仪通常采用逐点扫描的方式进行成像,若三维移动平台定位不准确,图像就会产生畸变,导致图像与样品不能匹配。针对这一问题提出了一种简便的拉曼成像定位精度检测方法,并基于费米函数拟合方法寻找边界来提高测量精度。通过在硅基底上镀一层70 nm厚金属铬图形的方法制作了检测模体,利用商业化仪器进行了实验验证,仪器的定位重复性为0.2μm。结果表明:该方法可以用于检测拉曼光谱仪的成像定位精度,具有简便和稳定的特点。Confocal Raman microscopy( CRM) usually acquires images by scanning samples point by point. The positioning error of three dimensional stages may cause the image distortion and the mismatch between the image and the real sample. A simple method was proposed to measure the positioning accuracy of the Raman imaging. The measurement accuracy was enhanced by using the method of Fermi function fitting. A testing phantom was fabricated by coating a 70 nm thick layer of chromium pattern onto the surface of a piece of silicon substrate. A commercial CRM was tested and its positioning repeatability is 0. 2 μm. Results show that the method is capable of measuring the positioning accuracy of CRM and it has the advantages of simplicity and stability.

关 键 词：计量学 定位精度 拉曼光谱 拉曼成像 检测模体 

分 类 号：TB96[机械工程—光学工程]