氢气退火炉关键部件研究与开发  

Research and Development of Key Components of Hydrogen Annealing Furnace

作　　者：赵志然 李明 黄志海 闫海莲 ZHAO Zhiran;LI Ming;HUANG Zhihai;YAN Hailian(Hunan Red Sun Photoelectricity Science and Technology Co.Ltd.,Changsha 410111,China)

机构地区：[1]湖南红太阳光电科技有限公司,湖南长沙410000

出　　处：《电子工业专用设备》2021年第5期50-54,共5页Equipment for Electronic Products Manufacturing

摘　　要：氢气尾气处理部分由炉门密封系统和尾气燃烧处理系统两部分组成,是涉及设备安全使用的关键部件,为了保障氢气退火炉的安全性和稳定运行,通过优化炉门密封结构,创新设计一种新型尾气燃烧装置;并对炉门密封系统的结构和安全逻辑以及尾气燃烧处理系统的结构组成与安全逻辑进行了分析研究,对炉门密封圈处的热场进行了仿真分析,确保密封圈的安全有效运转。最终通过实践应用,该密封系统和尾气燃烧处理系统结构稳定可靠,能够满足设备的安全使用要求。The hydrogen exhaust gas treatment portion consists of two parts:the furnace door sealing system and the exhaust gas combustion processing system,which is a key component involving the safety use of equipment.In order to ensure the safety and stability of the hydrogen retreat,the gates sealing structure is optimized,innovatively designs a new exhaust gas combustion device,and analyzes the structure and safety logic of the furnace door sealing system and the structural composition of the exhaust gas combustion processing system,and simulates the hot field at the furnace door seal,ensuring sealing the safe and effective operation of the circle.Finally,through practice,the sealing system and the exhaust gas combustion treatment system are stable and reliable,and can meet the safety usage requirements of the equipment.

关 键 词：氢气退火 炉门密封 尾气燃烧处理 安全逻辑 

分 类 号：TN305[电子电信—物理电子学]