电爆炸等离子体开关的结构设计及性能表征  

Structural design and performance characterization of electro-explosion plasma switch

作　　者：曾庆轩[1] 任杨阳 李明愉[1] 王涛[1] ZENG Qing-xuan;REN Yang-yang;LI Ming-yu;WANG Tao(State Key Laboratory of Explosion Science and Technology,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学爆炸科学与技术国家重点实验室,北京100081

出　　处：《安全与环境学报》2021年第5期2081-2086,共6页Journal of Safety and Environment

基　　金：国家自然科学基金项目(11872013);。

摘　　要：为了改善高压平面气体开关易受环境影响的问题,从而提高爆炸箔起爆系统的安全性,利用微加工工艺,设计并制备了一种新型高压开关--电爆炸等离子体开关,研究了不同温湿度条件下开关的自击穿电压,以及开关放电回路电感电阻。结果表明:开关的击穿场强在200~230 V/μm,并且不随环境温度及湿度变化而改变,表明新型开关在不同环境中的安全性更好;当主回路充电电压为1500 V、绝缘层厚度为9.55μm时,开关回路电感为86.07 nH,电阻为192.4 mΩ,并随绝缘层厚度增大而增大,因此在不发生自击穿的情况下,绝缘层厚度不宜过大。另外,与平面高压气体开关相比,新型开关具有较小的回路电感和较大的回路电阻。因此,在开关性能没有明显变化的情况下,电爆炸等离子体开关很好地改善了高压平面气体开关的缺陷,保障了系统的安全性。In order to overcome the defect of high-voltage planar gas switch susceptible to environmental influences and improve the safety of the exploding foil initiator system,a new type of high voltage switch named electro-explosion plasma switch was designed and fabricated by standard microelectronic technology.The new switch consists of two electrodes and an insulating layer between them.The two main electrodes were prepared using magnetron sputter deposition and lithography technology.The photosensitive polyimide was selected as the insulating material.The relevant structure dimensions of bridge foil were determined by experiments.Then,the key parameters(i.e.,the selfbreakdown voltage of the switch,the lumped inductance,and resistance of the switch discharge loop)under different temperature and humidity conditions were investigated.The results show that the breakdown field strength of the switch is between 200 and230 V/μm,and does not vary with the ambient temperature and humidity.It demonstrates that the electro-explosion plasma switch has better safety performance and adaptability in different environments.When the charging voltage of the main circuit is1500 V and the thickness of the insulating layer is 9.55μm,the lumped inductance of the switching loop reaches 86.07 nH while the resistance is 192.4 mΩ.Besides,the charging voltage does not influence the inductance,but the bigger the charging voltage,the lower the lumped resistance.The lumped inductance and resistance increase with increasing the thickness of the insulating layer.Therefore,the thickness of the insulating layer should not be too large within the self-breakdown voltage.Compared with the planar high-voltage switch,the new switch has smaller inductance and larger resistance.As a result,in the case of no obvious change in the performance,the electro-explosion plasma switch improves the defect of the high-voltage planar gas switch and ensures the safety of the system.

关 键 词：安全工程 爆炸箔起爆器 高压开关 自击穿电压 电感电阻 

分 类 号：X944[环境科学与工程—安全科学]