旋转平移法平面绝对检测的偏心误差修正  

Correction of Eccentricity Error in Absolute Flat Surface Testing by Shift-Rotation Method

作　　者：沈帆帆 田爱玲[1] 王大森 刘丙才[1] 朱学亮[1] 王红军[1] Shen Fanfan;Tian Ailing;Wang Dasen;Liu Bingcai;Zhu Xueliang;Wang Hongjun(College of Optoelectronic Engineering,Xi’an Technology University,Xi’an,Shaanxi 710032,China;Inner Mongolia Institute of Metal Materials,Ningbo,Zhejiang 315103,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710032 [2]内蒙古金属材料研究所,浙江宁波315103

出　　处：《激光与光电子学进展》2021年第19期169-176,共8页Laser & Optoelectronics Progress

基　　金：国防科工局基础科研基金(JSZL2018411C001)。

摘　　要：针对旋转平移法在检测过程中存在偏心误差的问题,提出一种基于三维面形的图像配准偏心误差修正方法。首先采用旋转平移绝对检测法获得旋转0°和旋转180°两个状态下被测镜的面形;然后利用三维面形数据构建相似度函数,实现被测镜面形在0°和180°状态下的配准,从而获得偏心误差。数值仿真计算结果表明,偏心误差修正前,残余面形的峰谷值为7.783 nm,均方根值为0.578 nm;偏心误差修正后,残余面形的峰谷值为0.034 nm,均方根值为0.004 nm。结果表明该修正方法可行,可以有效提高旋转平移法的检测精度,为高精度光学元件面形的绝对检测提供重要参考。Aiming at the problem of eccentricity error in shift-rotationn absolute measurement method in the detection process,a three-dimensional surface-based image registration eccentricity error correction method is proposed.First,the shift-rotation absolute measurement method is used to obtain the surface shape of the mirror under rotation 0°and rotation 180°.Then,the similarity function is constructed by using the 3D surface shape data to realize the registration of the tested mirror shape at 0°and 180°,so as to obtain the eccentricity error.The numerical simulation results show that the peak and valley value of the residual profile is 7.783 nm and the square mean root value is 0.578 nm before the correction of the eccentricity error.After correcting the eccentricity error,the peak and valley value of the residual profile is 0.034 nm,and the square mean root value is 0.004 nm.The results show that the correction method is feasible and can effectively improve the measurement accuracy of the shift-rotation method,which provides an important reference for the absolute measurement of high-precision optical element surface.

关 键 词：测量 绝对检测 旋转平移 偏心误差 图像配准 

分 类 号：TH741[机械工程—光学工程]