基于不规则U型结构的高灵敏度太赫兹微流传感器  

High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure

作　　者：李宗仁 邓琥[1,2,3] 杨洁萍 刘泉澄 郭进 尚丽平[1,2,3] Li Zongren;Deng Hu;Yang Jieping;Liu Quancheng;Guo Jin;Shang Liping(School of Information Engineering,Southzvest University of Science and Technology,Mianyang,Sichuan 621010,China;Key Laboratory of Special Environment Robotics of Sichuan Province,Mianyang,Sichuan 621010,China;Joint Laboratory for Extreme Conditions Matter Properties,Research Center of Laser Fusion,China Academy of Engineering Physics,Southwest University of Science and Technology,Mianyang,Sichuan 621010,China)

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]特殊环境机器人技术四川省重点实验室,四川绵阳621010 [3]西南科技大学中国工程物理研究院激光聚变研究中心极端条件物质特性联合实验室,四川绵阳621010

出　　处：《光学学报》2021年第19期232-238,共7页Acta Optica Sinica

基　　金：国家自然科学基金(11872058);国防技术基础项目(JSZL2017404A001,JSZL2018204C002);四川省科技厅重点研发项目(2019YFG0114)。

摘　　要：设计了一种基于不规则U型结构的高灵敏度太赫兹微流传感器,通过仿真软件研究了传感器金属结构中金属线的长度、宽度与夹角对品质因数与吸收率的影响,以及微流通道高度与盖层厚度对传感器性能的影响,最后仿真计算了传感器对不同质量分数葡萄糖溶液的检测性能。结果表明:传感器的最佳结构参数为L_(1)=84μm、L_(2)=82μm、L_(3)=52μm、W=5μm、θ=60°,相应的传感器品质因数可达24,灵敏度可达313 GHz/RIU。这种具有高品质因数与高灵敏度的超材料传感器在无标记微量物质检测方面具有较高的应用价值。A high-sensitivity terahertz microfluidic sensor based on the irregular U-type structure is proposed. The influence of the length, width, and angle of the metal wires in the sensor’s metal structure on the quality factor(Q factor) and the absorptivity of the sensor and that of the microfluidic channel height and the cap thickness on the sensing properties of the sensor are studied with simulation software. Finally, the detection performance of the sensor in glucose solutions at different mass fraction is calculated by simulation. The results show that the best combination of structural parameters for the sensor is L_(1)=84 μm, L_(2)=82 μm, L_(3)=52 μm, W=5 μm, and θ=60°, in which case the Q factor of the sensor can reach 24 and the sensitivity can reach 313 GHz/RIU. In short, this kind of microfluidic sensor with a high Q factor and high sensitivity has great application value in the field of label-free trace detection.

关 键 词：传感器 太赫兹 高灵敏度 品质因数 

分 类 号：O434.3[机械工程—光学工程]