高帧频384×288长波数字红外焦平面探测器  

High Frame Rate 384×288 Long-Wave Digital Infrared Focal Plane Array Detector

作　　者：张济清 钟昇佑 李正芬[1] 毛文彪 陈楠[1] 白丕绩[1] 韩庆林[1] 姚立斌[1] Zhang Jiqing;Zhong Shengyou;Li Zhengfen;Mao Wenbiao;Chen Nan;Bai Piji;Han Qinglin;Yao Libin(Kunming Institute of Physics,Kunming,Yunnan 650223,China)

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《光学学报》2021年第20期240-243,共4页Acta Optica Sinica

基　　金：国防预研基金(30102040104)。

摘　　要：高帧频红外焦平面探测器在红外武器系统、光谱成像和高速测温中有着重要应用。目前,我国高帧频红外焦平面技术还比较落后,这严重制约着我国高端红外武器装备、光谱成像技术、高速测温仪器的发展。针对高帧频红外成像应用,设计并流片加工了一款384×288面阵、像元间距为25μm的数字读出电路,与长波HgCdTe红外探测器芯片进行倒装互连,形成混合探测器芯片,并封装于金属真空杜瓦中,再配置斯特林制冷机,成功研制出了高帧频384×288长波数字红外探测器组件。经测试,所研制器件最高帧频达到1012 Hz,噪声等效温差(NETD)为16.8 mK,动态范围达到95.2 dB。采用所研制器件成功捕捉到了打火机点火瞬间的红外图像,该图像清晰呈现了火焰产生、迸出的过程,获得了良好的成像效果。High frame rate infrared focal plane array detectors have important applications in infrared weapon systems,spectral imaging,and high-speed temperature measurement.Currently,in our country,lag in high frame rate infrared focal plane array technology limits the development of high performance infrared weapon,spectral imaging,and high-speed temperature measurement technologies.Targeting at high frame rate infrared imaging applications,a 384×288 array,25-μm pitch digital readout integrated circuit is designed and fabricated,and then,hybridized to a long-wave HgCdTe detector array.A high frame rate 384×288 long-wave digital infrared detector assembly is implemented by assembling the hybrid focal plane array in a metal vacuum dewar and coupling with a Stirling cryocooler.Measurement results demonstrate that the maximum frame rate is 1012 Hz,noise equivalent temperature difference(NETD)is 16.8 mK,and dynamic range reaches 95.2 dB.An ignition of a lighter is successfully captured by the developed detector.In addition,the details of flame growth and spurting are clearly presented,and a good imaging effect is obtained.

关 键 词：探测器 红外探测器 读出电路 数字像素 高帧频红外成像 高动态范围 

分 类 号：TN215[电子电信—物理电子学]