Heterodyne Standing-Wave Interferometer with Improved Phase Stability  

作　　者：Ingo Ortlepp Jens-Peter Zollner Ivo W.Rangelow Eberhard Manske 

机构地区：[1]Institute of Process Measurement and Sensor Technology,Technische Universitat Ilmenau,EhrenbergstraBe 29,98693 Ilmenau,Germany [2]Microelectronic and Nanoelectronic Systems Group,Technische Universitat Ilmenau,Ilmenau,Germany [3]Nanoscale Systems Group,Technische Universitat Ilmenau,Ilmenau,Germany

出　　处：《Nanomanufacturing and Metrology》2021年第3期190-199,共10页纳米制造与计量（英文）

基　　金：funded by the German Federal Ministry of Education and Research under contract 03V0235.

摘　　要：This paper describes a standing-wave interferometer with two laser sources of different wavelengths,diametrically opposed and emitting towards each other.The resulting standing wave has an intensity profile which is moving with a constant velocity,and is directly detected inside the laser beam by two thin and transparent photo sensors.The first sensor is at a fixed position,serving as a phase reference for the second one which is moved along the optical axis,resulting in a frequency shift,proportional to the velocity.The phase difference between both sensors is evaluated for the purpose of interferometric length measurements.

关 键 词：Standing wave INTERFEROMETER HETERODYNE Ultrathin photo diode 

分 类 号：TN2[电子电信—物理电子学]