Al掺杂ZnO透明导电薄膜表面修饰及其光电性能的创新实验设计  

Innovative Experimental Design of Surface Modification and Photoelectric Properties of Al Doped ZnO Transparent Conductive Films

作　　者：肖雪春[1] 王毓德[1] 王莉红[1] 黄强[1] 董成军[1] 管洪涛[1] 胡剑巧 钱伟[1] Xiao Xuechun;Wang Yude;Wang Lihong;Huang Qiang;Dong Chengjun;Guan Hongtao;Hu Jianqiao;Qian Wei(School of Materials and Energy,Yunnan University,Kunming 650091,China)

机构地区：[1]云南大学材料与能源学院,云南昆明650091

出　　处：《山东化工》2021年第21期9-11,共3页Shandong Chemical Industry

基　　金：云南大学2018年本科优秀教学团队项目(2018JXTD014)。

摘　　要：采用简单的溶胶-凝胶方法在石英玻璃衬底上制备了Al掺杂的ZnO(AZO)透明导电薄膜,通过用40 W 365 nm波长的紫外灯(UVA)照射对所制备的AZO薄膜进行表面修饰,并用紫外分光光度计研究了其光电性能。结果表明,所制备的AZO薄膜为透明导电薄膜,且经UVA表面处理后,AZO薄膜的电阻率从1.62Ω·cm降低到了4.7×10^(-2)Ω·cm,可以归因于AZO薄膜表面存在较多的氧负离子。该实验方案过程简单,实验内容涉及材料、化学和物理等相关知识,可以进一步加深学生对材料科学的理解以及培养学生的思考和动手能力,适合用于创新实验教学。Al-doped ZnO(AZO)transparent conducting films was prepared on quartz glass substrate by a facile sol-gel method.The AZO film’s surface was modified with UVA(40 W 365 nm)irradiation and its optical and electronic properties were investigated using UV-vis.Results reveals that as-prepared AZO film is transparent conducting film and the conductivity of AZO film decreased from 1.62Ω·cm to 4.7×10^(-2)Ω·cm after AZO film were treated by UVA,which may attribute to the large amount of negative oxygen ions.The process of this experimental plan is simple.The experiment contents involve the materials science,chemistry and physics.It is beneficial for students to understand knowledge about the materials science and train their capacities of thinking and acting.Moreover,it is more suitable for innovative experimental teaching.

关 键 词：溶胶-凝胶法 AZO 透明导电薄膜 光电性能 创新实验教学 

分 类 号：TQ132.4[化学工程—无机化工] O484.4[理学—固体物理]