散射式扫描近场光学显微系统的研制及应用测试  

Development and Application Test of Scattering-type Scanning Near-field Optical Microscope

作　　者：陈楠 王玥 刘涛[1,2] 夏洋 CHEN Nan;WANG Yue;LIU Tao;XIA Yang(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China;Beijing Key Laboratory of IC Test Technology,Beijing 100029,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049 [3]北京市微电子制备仪器设备工程技术研究中心,北京100029 [4]集成电路测试技术北京市重点实验室,北京100029

出　　处：《光子学报》2021年第11期195-203,共9页Acta Photonica Sinica

基　　金：国家自然科学基金重大科研仪器研制专项(No.61427901);国家重点研发计划(No.2018YFA0704804);中国科学院科研装备研制项目(No.YJKYYQ20180033)。

摘　　要：基于扫描探针技术设计搭建了一套散射式扫描近场光学显微系统。基于搭建的系统结构和近场信号探测原理,理论分析和实验讨论了不同因素的干扰、解调阶次、聚焦光斑等因素对近场光学信号提取的影响。为进一步验证装置性能,对纳米金颗粒和机械剥离的六方氮化硼样品进行了测试。结果表明,所搭建的装置实现了10 nm的空间分辨率,可以清晰地观察到六方氮化硼表面声子极化激元在传播-反射过程中形成的驻波现象,展示了该技术在低维纳米材料光学表征中应用的巨大应用潜力。Based on scanning probe microscope,a set of scattering scanning near-field optical imaging device is designed.The structure of the device and the basic near-field signal detection principle are introduced,andthe influence of the demodulation order,focus spot size and other factors on the near-field optical signal extraction are discussed through models and experiments.In order to verify the performance of the device,a sample of gold nano-particles and a sample of h-BN microcrystals be characterized.The results show that the home-made device achieves a spatial resolution of 10 nm,and the standing wave phenomenon formed by the h-BN phonon polarization excimer can be clearly observed,demonstrating the huge application potential of this technology.

关 键 词：散射式扫描近场光学显微镜 扫描探针技术 近场光学 衍射极限 超分辨 

分 类 号：O436.2[机械工程—光学工程]