A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches  

作　　者：Shan-Shan Wang Qian-Nan Wu Yue-Sheng Gao Jian-Gang Yu Qian-Long Cao Lu-Lu Han Meng-Wei Li 王姗姗;吴倩楠;高跃升;余建刚;曹钎龙;韩路路;李孟委(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Nantong Institute of Intelligent Opto-Mechatronics,North University of China,Nantong 226000,China;Center for Microsystem Intergration,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Science,North University of China,Taiyuan 030051,China)

机构地区：[1]School of Instrument and Electronics,North University of China,Taiyuan 030051,China [2]Nantong Institute of Intelligent Opto-Mechatronics,North University of China,Nantong 226000,China [3]Center for Microsystem Intergration,North University of China,Taiyuan 030051,China [4]Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China [5]School of Science,North University of China,Taiyuan 030051,China

出　　处：《Chinese Physics B》2021年第11期644-649,共6页中国物理B（英文版）

基　　金：Project supported by the National Defense Technology Industry Strong,China (Grant No. JCKY2018408B006);the Information System New Items Project,China (Grant Nos. 2018XW0026 and 2019XW0010);the Information System Pre-research Project,China (Grant No. 31513060101)

摘　　要：Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.

关 键 词：microelectromechanical system(MEMS) electronic calibration kit single-pole double-throw(SPDT)switch short-open-load-through(SOLT)calibration 

分 类 号：TN03[电子电信—物理电子学]