高能离子检测飞行时间质谱仪的研制及其在等离子体诊断中的应用  

Development of Time-of-Flight Mass Spectrometer for Detection of High Energy Ion and Its Application in Plasma Diagnosis

作　　者：洪义[1] 余志 麦泽彬 黎明[3] 万翔[3] 陈磊[3] 谭国斌 李磊 黄正旭 HONG Yi;YU Zhi;MAI Ze-Bin;LI Ming;WAN Xiang;CHEN Lei;TAN Guo-Bin;LI Lei;HUANG Zheng-Xu(Institute of Environmental Pollution and Health,School of Environmental and Chemical Engineering,Shanghai University,Shanghai 200444,China;Guangzhou Hexin Analytical Instrument CO.,LTD.,Guangzhou 510530,China;Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China;Institute of Mass Spectrometer and Atmospheric Environment,Jinan University,Guangzhou 510632,China)

机构地区：[1]上海大学环境与化学工程学院环境污染与健康研究所,上海200444 [2]广州禾信仪器股份有限公司,广州510530 [3]中国工程物理研究院电子工程研究所,绵阳621900 [4]暨南大学质谱仪器与大气环境研究所,广州510632

出　　处：《分析化学》2021年第12期1970-1976,共7页Chinese Journal of Analytical Chemistry

基　　金：增材制造与激光制造资助项目(No.2017YFB1103903);广东省“精准医学与干细胞”重大科技专项(No.2019B020231002)资助。

摘　　要：研发和改进可用于真空放电等激发方式产生的高能离子诊断的分析仪器对高能等离子体研究具有重要意义。本研究研制了一种用于高能量等离子体诊断的飞行时间质谱仪(Time-of-flight mass spectrometer,TOF-MS),结合铝材料真空放电离子源,实现了H^(+)、H^(2+)、C^(2+)、Al^(3+)、C^(+)、Al^(2+)、O^(+)和Al^(+)离子的定性分析,离子能量涵盖23~150 keV。考察了离子门的脉宽和脉冲的电压值对TOF-MS性能的影响,结果表明,当离子门脉宽为100 ns、加速电压分别为20和50 kV时,离子门最优电压分别为±500 V和±2500 V。加速电压为50 kV时,质量分辨率可达22 FWHM(Full width at half maxium)。进一步通过调节离子门脉冲的延迟时间,考察了离子峰强度随时间的变化趋势。The development and improvement of instrument for diagnosis of high energy ion generated by the method such as vaccum discharge is very important for improving the research level of high energy plasma.In this work,a time-of-flight mass spectrometer(TOF-MS)for diagnosis of high-energy ion was developed,and the qualitative analysis of high energy ions(H^(+),H^(2+),C^(2+),Al^(3+),C^(+),Al^(2+),O+and Al^(+))between 10 and 150 keV was carried out on the basis of aluminum vacuum discharge ion source.The influence of pulse width and voltage of ion gate on performance of TOF-MS was optimized,and it was found that,when the pulse width was 100 ns and the accelerating voltages were 20 kV and 50 kV,respectively,the best voltages of ion gate were±500 V and±2500 V.Besides,it was found that the mass resolution was 22 FWHM(Full width at half maximum)when the accelerating voltage was 50 kV.Temporal variation of intensity of different ions was further studied by changing the delay time of pulse of ion gate.

关 键 词：飞行时间质谱 等离子体诊断 真空放电 

分 类 号：O657.63[理学—分析化学]