超低膨胀微晶玻璃中飞秒激光直写波导探索  

Femtosecond Laser Direct Written Waveguides in Ultra-Low Expansion Glass-Ceramics

作　　者：李子煌 高运周 范仕刚[3] 顾少轩[1] 陶海征[1] LI Zihuang;GAO Yunzhou;FAN Shigang;GU Shaoxuan;TAO Haizheng(State Key Laboratory of Silicate Materials for Architectures,Wuhan University of Technology,Wuhan 430070,China;Sichuan Shenguang Quartz Science and Technology Co.,Ltd.,Mianyang 621700,China;Beijing Sinoma Synthetic Crystals Co.,Ltd.,Beijing 100018,China)

机构地区：[1]武汉理工大学硅酸盐建筑材料国家重点实验室,武汉430070 [2]四川神光石英科技有限公司,绵阳621700 [3]北京中材人工晶体研究院有限公司,北京100018

出　　处：《硅酸盐通报》2021年第11期3784-3790,共7页Bulletin of the Chinese Ceramic Society

基　　金：国家自然科学基金(51772223);武汉理工大学研究生优秀学位论文培育项目(2018-YS-002)。

摘　　要：采用飞秒激光直写显微加工方法,基于优化的激光参数,在超低膨胀微晶玻璃中制备了插入损耗为4.94 dB的单线型波导。利用拉曼散射光谱仪、X射线衍射仪和分光光度计对激光辐照前后微晶玻璃的结构及透过率进行了表征,利用扫描电镜和能谱仪表征了样品的截面形貌及元素分布,基于2%(质量分数)HF稀溶液腐蚀试验,对样品的抗化学腐蚀能力进行了表征,利用X射线光电子能谱仪对样品中锆离子和钛离子的价态进行了表征。结果表明,微晶玻璃经激光辐照后抗化学腐蚀性能下降,透过光谱中出现了微小但不可忽略的吸收带。结合X射线光电子能谱分析,证实这些现象是由微晶玻璃中Zr ^(4+)或Ti ^(4+)受激光辐照还原为具有更高化学活性的低价亚稳Zr ^(3+)或Ti ^(3+)造成的。Basing on optimized laser parameters,optical waveguides with an insertion loss of 4.94 dB were fabricated in ultra-low expansion glass-ceramics by using femtosecond laser to directly write waveguide method.The structure and transmittance of the glass-ceramics before and after laser irradiation were characterized by Raman spectrometer,X-ray diffractometer and spectrophotometer.The cross-section morphology and element distribution of samples were characterized by SEM and EDS.Based on the 2%(mass fraction)HF dilute solution corrosion test,the chemical corrosion resistance of samples was characterized.The valence states of zirconium and titanium ions in samples were characterized by X-ray photoelectron spectroscopy.The results show that after laser irradiation the chemical corrosion resistance of glass-ceramics decreases,some small and obvious absorption bands appeares in glass-ceramics.Combined with X-ray photoelectron spectroscopy analysis,it is confirmed that these phenomena are caused by the reduction of Zr ^(4+)or Ti ^(4+)in glass-ceramics into meta-stable Zr ^(3+)or Ti ^(3+)with higher chemical activity.

关 键 词：超低膨胀微晶玻璃 飞秒激光 光波导 光还原 折射率 抗化学腐蚀性能 

分 类 号：TQ171.71[化学工程—玻璃工业]