复合澄清剂在TFT基板玻璃熔制过程中的作用机理  

Mechanism of Compound Refining Agents for TFT Substrate Glass Melting Process

作　　者：黄依平 舒众众 曹志强 张晓东 张冲 金良茂 沈玉国 HUANG Yiping;SHU Zhongzhong;CAO Zhiqiang;ZHANG Xiaodong;ZHANG Chong;JIN Liangmao;SHEN Yuguo(Bengbu COE Technology Co.Ltd,Bengbu 233030,China;School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China;Bengbu Design&Research Institute for Glass Industry,Bengbu 233030,China)

机构地区：[1]蚌埠中光电科技有限公司,蚌埠233030 [2]浙江大学材料科学与工程学院,杭州310027 [3]中建材蚌埠玻璃工业设计研究院有限公司,蚌埠233030

出　　处：《硅酸盐通报》2021年第11期3799-3806,共8页Bulletin of the Chinese Ceramic Society

基　　金：国家重点研发计划(2016YFB0303704)。

摘　　要：针对当前薄膜晶体管(TFT)基板玻璃熔制过程中澄清剂作用机理认识不足的问题,采用模拟TFT基板玻璃浮法熔制工艺与高温熔融动态观察相结合的方式,研究了SnO_(2)、CaSO_(4)、NaCl等单一和复合澄清剂在熔制过程中的适用温度、澄清效果等,对基板玻璃热学性能、玻璃块体中Na^(+)含量与NaCl澄清剂使用量的关系进行探讨。结果表明:SnO_(2)单一澄清剂的适宜用量为0.10%(质量分数);复合澄清剂中0.10%(质量分数)SnO_(2)+0.35%(质量分数)CaSO_(4)形成的梯度澄清效果最佳;复合澄清剂SnO_(2)+NaCl构成协同澄清,澄清效果随NaCl用量的增加而提高,但NaCl澄清剂的使用量应不高于0.0763%(质量分数),以满足基板玻璃对残留碱金属离子含量的严格要求。以上研究成果对改善TFT基板玻璃熔制质量和产品品质具有重要的参考意义,有利于相关工业化生产降本增效。Aiming to better understand the mechanism of refining agents for thin film transistor(TFT)substrate glass melting process,the proper temperature and refining effect of SnO_(2),CaSO_(4),NaCl and their compounds in melting process were studied by simulating float melting technology of TFT substrate glass.A high temperature melting dynamic observation was also used to study the detailed melting process.The effect of the NaCl amount used on the thermal properties of glass and the residual Na^(+)content in glass was discussed.The results show that the appropriate amount of SnO_(2) is 0.10%(mass fraction)as a single refining agent.The further investigations on the compound refining agents indicate that the gradient clarification composed of 0.10%(mass fraction)SnO_(2) and 0.35%(mass fraction)CaSO_(4) has the best refining performance.For the synergy clarification composed of SnO_(2) and NaCl,the refining performance increases with the increase of the amount of NaCl,but it should not exceed 0.0763%(mass fraction)to satisfy the strict requirements of TFT substrate glass.The above research results offer important information for improving melting technology and product quality of TFT substrate glass,and they are beneficial to reduce cost and increase efficiency for the related industrial production.

关 键 词：复合澄清剂 基板玻璃 浮法熔制工艺 高温熔融动态观察 梯度澄清 协同澄清 

分 类 号：TQ171[化学工程—玻璃工业]