侧向耦合分布反馈半导体激光器光栅结构及耦合特性  

Grating Structure and Coupling Characteristics of Laterally-coupled Distributed Feedback Semiconductor Lasers

作　　者：李瑞冬 邹永刚 田锟 王睿 范杰 兰云萍 LI Rui-dong;ZOU Yong-gang;TIAN Kun;WANG Rui;FAN Jie;LAN Yun-ping(State Key Laboratory of High-power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022

出　　处：《发光学报》2021年第12期1921-1927,共7页Chinese Journal of Luminescence

基　　金：吉林省科技发展计划(20190302052GX,20210201030GX)资助项目。

摘　　要：耦合系数是评价分布反馈(DFB)半导体激光器光栅性能的重要参数。本文基于耦合波理论,结合数值模拟,研究了侧向耦合表面光栅结构参数对其耦合特性的影响。与矩形光栅侧向耦合脊波导结构对比,研究了对称梯形、错位梯形、对称结形、错位结形、双对称梯形和双对称结形六种特殊侧向微结构光栅,通过改变光栅侧壁纵向倾角、调整光栅的光学限制因子等途径,有效地实现了光栅的耦合系数调控。模拟分析了脊波导特殊侧向微结构光栅的占空比、脊宽、光栅侧向宽度等结构参数对耦合系数的影响,发现合理的结构参数能够有效地缓解耦合系数的波动,有助于减少工艺误差对耦合系数的影响。本工作为后续光栅结构设计与制备提供了理论依据。Coupling coefficient is an important parameter for evaluating the grating performance of distributed feedback(DFB)semiconductor lasers.In this paper,based on the coupled-wave theory and combined with numerical simulation,the effect of the structural parameters of the laterally-coupled surface grating on their coupling characteristics is investigated.In contrast to the laterally-coupled ridge-waveguide structure of rectangular gratings,six special lateral microstructure gratings,namely,symmetric trapezoid,misaligned trapezoid,symmetric junction,misaligned junction,bisymmetric trapezoid and bisymmetric junction,have been studied to effectively achieve the coupling coefficient regulation of gratings by changing the longitudinal inclination angle of the grating sidewalls and adjusting the optical confinement factor of the grating.The effects of structural parameters such as duty cycle,ridge width and lateral width of the grating on the coupling coefficient of the special lateral microstructure grating of ridge-waveguide were simulated and analyzed,and it was found that reasonable structural parameters can effectively mitigate the fluctuation of the coupling coefficient and help reduce the effect of process errors on the coupling coefficient.The work in this paper provides a theoretical basis for the design and preparation of subsequent grating structures.

关 键 词：布拉格光栅 耦合系数 侧向耦合 分布反馈 

分 类 号：TN248.4[电子电信—物理电子学]