Humidity sensing properties of spray deposited Fe doped TiO_(2)thin film  

作　　者：Dipak L Gapale Pranav P.Bardapurkar Sandeep A.Arote Sanjaykumar Dalvi Prashant Baviskar Ratan Y Borse 

机构地区：[1]S.N.Arts,D.J.M.Commerce and B.N.S.Science College Sangamner,District Ahmednagar 422605 MS,India [2]Thin and Thick film Laboratory,Department of Electronics,M.S.G.College,Malegaon Camp(Pin 423105),District Nashik,Maharashtra,India

出　　处：《Journal of Semiconductors》2021年第12期62-71,共10页半导体学报（英文版）

摘　　要：In the present work,ferrite(Fe)doped TiO_(2)thin films with different volume percentage(vol%)were synthesized using a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size,texture coefficient,microstrain,dislocation densities etc.were evaluated from the X ray diffratometry(XRD)data.XRD data revealed a polycrystalline anatase TiO_(2)phase for sample synthesized up to 2 vol%and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol%Fe doped TiO_(2).The crystalline size was observed to decrease with increase in Fe dopant vol%and also other structural parameters changes with Fe dopant percentage.In the present work,electrical resistance was observed to decrease with a rise in Fe dopant vol%and temperature of the sample.Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%.Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%.In the present paper,maximum sensitivity of about 88.7%for the sample synthesized with 2 vol%Fe doped TiO_(2)and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.

关 键 词：Fe doped TiO_(2) thin films spray pyrolysis humidity sensing 

分 类 号：TB383.2[一般工业技术—材料科学与工程]