基于激光切割的二自由度悬臂梁式压电能量采集器  

Two-Degree-of-Freedom Cantilever Beam Piezoelectric Energy Harvester Based on Laser Cutting

作　　者：董璇 王保志 张成功 王欢 李以贵 Dong Xuan;Wang Baozhi;Zhang Chenggong;Wang Huan;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China;School of Electrical and Electronic Engineering,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418 [2]上海应用技术大学电气与电子工程学院,上海201418

出　　处：《微纳电子技术》2021年第12期1088-1093,1099,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号);上海市“联盟计划”资助项目(LM201929)。

摘　　要：为达到拓宽有效输出带宽的目的,设计了一种二自由度的锆钛酸铅(PZT)悬臂梁式压电能量采集器。通过激光切割加工悬臂梁式压电能量采集器,制备了镂空式的二自由度的PZT悬臂梁式压电能量采集器结构。利用COMSOL软件,对二自由度的PZT悬臂梁式压电能量采集器结构进行了设计和仿真。仿真结果表明设计的二自由度的能量采集器具有两个输出电压峰值;并降低了一阶固有频率。利用数字信号发生器、功率放大器、振动台、示波器等仪器搭建了测试系统,并对该样品进行了性能测试。测试结果表明,在0.5g加速度下,未进行切割加工的单自由度悬臂梁式压电能量采集器的固有频率为31.23 Hz,输出峰值电压为15 V;进行切割加工后的二自由度悬臂梁式压电能量采集器的固有频率为27.13 Hz和61.11 Hz,输出电压峰值为15.4 V和2 V。相较于未切割的悬臂梁式压电能量采集器,该悬臂梁式压电能量采集器的输出电压略有提升,一阶固有频率也有所降低。得出有限元计算结果和实验结果基本一致。To widen the effective output bandwidth, a two-degree-of-freedom lead zirconate titanate(PZT) cantilever beam piezoelectric energy harvester was designed. The cantilever beam piezoelectric energy harvester was processed by laser cutting, and then a hollow two-degree-of-freedom PZT cantilever beam piezoelectric energy harvester structure was prepared. With the COMSOL software, the two-degree-of-freedom PZT cantilever beam piezoelectric energy harves-ter structure was designed and simulated. The simulation results show that the designed two-degree-of-freedom energy harvester has two output voltage peaks, and the first-order natural frequency is reduced. A test system was built using the digital signal generator, power amplifier, shaking table, oscilloscope and other instruments, and the sample performances were tested. The test results show that at the 0.5g acceleration, the natural frequency of the single-degree-of-freedom cantilever beam beam piezoelectric energy harvester without cutting is 31.23 Hz and the output voltage peak voltage is 15 V;the natural frequencies of the two-degree-of-freedom cantilever beam piezoelectric energy harvester after cutting are 27.13 Hz and 61.11 Hz, and the output voltage peaks are 15.4 V and 2 V. Compared with the cantilever beam piezoelectric energy harvester without cutting, the output voltage of the designed cantilever beam piezoelectric energy harvester is slightly increased, and the first-order natural frequency is also reduced. It is concluded that the finite element calculation results are basically consistent with the experimental results.

关 键 词：微电子机械系统(MEMS) 压电能量采集 激光切割 二自由度 带宽优化 COMSOL仿真 

分 类 号：TM919[电气工程—电力电子与电力传动] TH703[机械工程—仪器科学与技术]