微热对流式惯性传感器悬臂梁结构的优化与制备  

Optimization and Preparation of Cantilever Beam Structure of Micro-Thermal Convection Inertial Sensor

作　　者：王佩英 邱霁玄 王欢 张成功 李以贵 Wang Peiying;Qiu Jixuan;Wang Huan;Zhang Chenggong;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2021年第12期1108-1113,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市农委重点项目(沪农科创字(2018)第3-3号)。

摘　　要：为进一步提高微热对流式惯性传感器的设计精度与灵敏度,对常用的悬臂梁结构进行了优化。设计了三种不同悬臂梁结构尺寸的微热对流式陀螺仪作为实验载体。为得到悬臂梁结构对传感器灵敏度的影响,仿真分析了三种不同尺寸悬臂梁的加热器功耗与性能因数的关系。采用微电子机械系统(MEMS)工艺分别制备了三种微热对流式陀螺仪芯片,并对其进行封装。为验证仿真实验得出的悬臂梁不能过宽过厚的结论,对所制备的三种陀螺仪分别进行了加热器功耗与性能因数以及角速度与输出电压的测试实验。测试结果表明:在对加热器和热敏电阻分别施以工作电压7和2 V时,测得三种陀螺仪X方向上的灵敏度分别为1.9、0.4和1.1μV/rad/s。因此对于微、纳米级热对流式惯性传感器,其悬臂梁结构对热敏电阻传热的影响不能忽略,可通过优化悬臂梁的结构尺寸进而提高传感器的灵敏度。To further improve the design accuracy and sensitivity of the micro-thermal convection inertial sensor, the commonly used cantilever beam structure was optimized. Three kinds of micro-thermal convection gyroscopes with different cantilever beam structure sizes were designed as experimental carriers. For obtaining the influence of the cantilever beam structure on the sensitivity of the sensor, the relationship between the power consumption and the performance factor of the heater with three cantilever beams of different sizes was simulated and analyzed. Three micro-thermal convection gyroscope chips were prepared by micro-electromechanical system(MEMS) technology and packaged. To verify the conclusion that the cantilever beam cannot be too wide or too thick from the simulation experiment, the tests of heater power consumption-performance factor and angular velocity-output voltage of the prepared three gyroscopes were carried out. The test results show that when the operating voltages 7 and 2 V are applied to the heaters and thermistors respectively, the sensitivities of the three gyroscopes in the X direction are 1.9, 0.4 and 1.1 μV/rad/s. Therefore, the influence of the cantilever beam structure for micro-and nano-scale thermal convection inertial sensors on heat transfer of the thermistor cannot be ignored. The sensitivity of the sensor can be improved by optimizing the structural size of the cantilever beam.

关 键 词：微电子机械系统(MEMS) 传感器 微陀螺仪 热传导 悬臂梁 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V241.5[自动化与计算机技术—控制科学与工程]