六氟化硫气体探测用10.56μm窄带滤光片的研制  

Development of 10.56μm NBP filter for sulfur hexafluoride gas detection

作　　者：何虎 许晴 张杰 于海洋 HE Hu;XU Qing;ZHANG Jie;YU Haiyang(R&D center,Shanghai AEGIS Industrial Safety Equipment Co.,LTD,Shanghai 201114,China)

机构地区：[1]上海翼捷工业安全设备股份有限公司研发中心,上海201114

出　　处：《光学仪器》2021年第6期46-51,共6页Optical Instruments

摘　　要：在六氟化硫气体检测中经常会使用红外气体传感器,红外滤光片是红外气体传感器的核心元件。对六氟化硫的红外气体探测中,研制性价比较高的10.56μm窄带滤光片尤其重要。首先,通过测量空气和六氟化硫气体的红外吸收光谱,明确了基于NDIR技术的红外传感器需要的滤光片的光谱指标。然后,使用单晶硅为基底,锗和硫化锌为高、低折射率材料,设计了窄带膜系和截止膜系两种膜系结构。通过选择合理的工艺参数,镀制了中心波长为10.562μm、带宽为175 nm、峰值透射率为80.2%、截止范围为2~18μm(除通带)的红外滤光片。最后,经环境测试和传感器测试,证明该滤光片满足使用要求。Infrared gas sensor is often used in the detection of sulfur hexafluoride gas.By measuring the infrared absorption spectra of air and sulfur hexafluoride gas,we understand the spectral requirements of the filter based on non-dispersive infra-red(NDIR)gas sensor.Then,monocrystalline silicon is selected as substrate,and germanium and zinc sulfide are selected as high and low refractive index materials separately.Two kinds of film structures,narrow-band pass film structure and cut-off film structure,were designed.The infrared filter with central wavelength of 10.562μm,bandwidth of 175 nm,peak transmittance of 80.2%and cut-off range of 2~18μm(except the pass band),was prepared by selecting reasonable process parameters.Finally,the filter met the engineering application by environmental test and sensor test.ental test and sensor test.

关 键 词：红外滤光片 六氟化硫气体 光学镀膜 红外传感器 

分 类 号：O484[理学—固体物理]