微纳结构飞切加工与表面结构色调控  

Research on Micro-nano Structure Machining and Property Manipulation of the Structural Color Surface

作　　者：董晓彬 周天丰[1] 贺裕鹏 王添星 刘朋 赵斌 赵文祥[1] 王西彬[1] DONG Xiaobin;ZHOU Tianfeng;HE Yupeng;WANG Tianxing;LIU Peng;ZHAO Bin;ZHAO Wenxiang;WANG Xibin(School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081;Beijing Institute of Astronautical System Engineering,Beijing 100076;Chongqing Innovation Center,Beijing Institute of Technology,Chongqing 401120)

机构地区：[1]北京理工大学机械与车辆学院,北京100081 [2]北京宇航系统工程研究所,北京100076 [3]北京理工大学重庆创新中心,重庆401120

出　　处：《机械工程学报》2021年第19期239-245,共7页Journal of Mechanical Engineering

基　　金：国家自然科学基金(51775046、51875043、52005040);北京市自然科学基金(JQ20014);中国博士后基金面上(2019M660480)资助项目。

摘　　要：当微纳结构尺度与可见光波长尺度接近时,在白光照射下将产生特定的结构色,颜色鲜艳亮丽。结构色的色彩特性由微纳结构形状特征和周期尺度决定,其颜色鲜艳程度和亮度由微纳结构形状精度和表面质量决定。提出了一种微纳结构轴向进给飞切加工方法,通过在磷化镍(Ni-P)材料表面高效率高精度加工出微纳米尺度的"梭形沟槽",其单元特征尺寸为200~1 000 nm、表面粗糙度为7~10 nm,实现了结构色微纳结构单元和色彩特征调控;并通过加工轨迹规划和工艺参数调控,实现了结构色像素单元与单元之间的无缝拼接,最终形成大面积结构色图案的制造与调控。本技术将在结构色滤光、微纳仿生结构以及功能表面等方面中产生巨大的应用价值。Bright structural color will be produced with the light irradiating on the micro-nano structure with the size order of visible light wavelength. The structural color property is determined by the shape characteristic and the period of the micro-nano structure,and the brightness of the color is determined by the surface quality of the micro-nano structure. Focusing on this point, a method termed as axial-direction feed fly cutting is proposed for the fabrication of structural color surface on the Nickel phosphorus(Ni-P).Shuttle-shaped micro-nano structure with period of 200~1 000 nm and surface roughness of 7~10 nm is efficiently machined in this process and the color property of the corresponding structural color unit is well manipulated. Then the large area structural color surface with designed structural color pattern is fabricated through the seamless splicing of the structure color pixel unit by planning the machining path and controlling process parameters. The proposed machining method has great potential value in structure color filter, micro-nano bionic structure and functional surface.

关 键 词：微纳结构 微沟槽 飞切加工 结构色 磷化镍 

分 类 号：TH161[机械工程—机械制造及自动化]