气泡化学气相沉积法制备石墨烯粉体生产设备设计与分析  

Design and Analysis of Production Equipment for Preparing Graphene Powder by Bubbling Chemical Vapor Deposition

作　　者：蔡晓明[1,2] 徐赣君 郝振亮 黄文添 蔡金明 吴张永 CAI Xiaoming;XU Ganjun;HAO Zhenliang;HUANG Wentian;CAI Jinming;WU Zhangyong(Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500,China;D&R Graphene Research Institute,Dongguan 523069,China;College of Mechanical&Electrical Engineerings Nanjing University of Aeronautics&Astronautics,Nanjing 210016,China)

机构地区：[1]昆明理工大学机电工程学院,昆明650500 [2]东莞道睿石墨烯研究院,东莞523069 [3]南京航空航天大学机电学院,南京210016

出　　处：《真空科学与技术学报》2021年第10期969-974,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(11674136,51165012)。

摘　　要：根据气泡化学气相沉积法制备石墨烯粉体的工艺设计了一套生产设备。该设备由生产系统和收集系统组成,生产系统包括加热装置、进气装置和支撑装置三个子部件,能减少产品杂质,实现"冷壁"连续生产;收集系统包括收集管道、收集容器和抽气泵组成,采用串联分级式变截面沉降收集。采用有限元分析,在稳态热、热固耦合强度、拓扑优化、流场方面对该设备的实际工况进行分析模拟。According to the preparation process of graphene powder by bubble chemical vapor deposition,aset of production equipment was designed.The equipment is composed of a production system and a collection sys-tem.The production system includes heating device,air inlet device and support device,which can reduce impuri-ties and realize continuous production of"cold wall".The collecting system consists of collecting pipe,collectingcontainer and air pump,and adopts series graded variable cross-section settlement collection.Finite element analy-sis is used to analyze and simulate the actual working conditions of the equipment in the aspects of steady-statethermal,thermo-solid coupling strength,topology optimization and flow field.

关 键 词：气泡化学气相沉积法 石墨烯 冷壁 连续生产 有限元分析 

分 类 号：TH69[机械工程—机械制造及自动化]