基于金属圆筒的光纤法珀压力传感器  

Optical Fiber Fabry-perot Pressure Sensor Based on Metal Cylinder

作　　者：刘明尧[1] 舒显爽 刘繄[1] 王群章 王君 LIU Ming-yao;SHU Xian-shuang;LIU Yi;WANG Qun-zhang;WANG Jun(School of Mechanical and Electronic Engineering,Wuhan University of Technology,Wuhan 430070,China;Sinopec Henan Oilfield Company,Nanyang 473000,China)

机构地区：[1]武汉理工大学机电工程学院,武汉430070 [2]中国石化河南油田分公司,南阳473000

出　　处：《武汉理工大学学报》2020年第3期86-90,共5页Journal of Wuhan University of Technology

摘　　要：为满足工业液压系统对大量程压力传感器的需求,研制了一种基于Fabry-Perot(F-P)干涉仪原理的大量程小型化压力传感器。该传感器使用金属圆筒作为压力感知元件,金属圆筒轴向变形挤压毛细石英管,进而使毛细石英管内部的F-P腔产生位移,通过解调F-P腔的腔长变化可在35MPa压力范围内实现压力测量,同时串联自由的光纤布拉格光栅(FBG)实现温度补偿。实验结果表明,该传感器的压力灵敏度为0.19μm/MPa,温度灵敏度为0.31μm/℃,线性相关系数均为0.99以上,在实际液压管路的测量中具有很高的应用价值。In order to meet the needs of industrial hydraulic systems for large-range pressure sensors,a small-scale pressure sensor based on the principle of Fabry-Perot(F-P)interferometer was developed.This sensor uses a metal cylinder as a pressure sensing element.The metal cylinder deforms axially and squeezes the glass tube,and then the F-P cavity inside the glass tube is displaced.By demodulating the change in the length of the F-P cavity,the pressure can be measured within the pressure range of 35 MPa.At the same time,the free fiber Bragg grating(FBG)is connected in series to realize temperature compensation.The experimental results show that the pressure sensitivity of the sensor is 0.19μm/MPa,the temperature sensitivity is 0.31μm/℃,and the linear correlation coefficient is above 0.99.It has high application value in the actual hydraulic pipeline measurement.

关 键 词：光纤Fabry-Perot腔 金属圆筒 高压传感器 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]