基于电驱动纳米光栅的结构设计及仿真分析  

Structure Design and Simulation Analysis Based on Electrically Driven Nanograting

作　　者：张周强 周玲 郭忠超 黄乾玮 李晓飞 Zhang Zhouqiang;Zhou Ling;Guo Zhongchao;Huang Qianwei;Li Xiaofei(School of Mechanical and Electrical Engineering,Xi'an Polytechnic University,Xi'an,Shaanxi 710600,China)

机构地区：[1]西安工程大学机电工程学院,陕西西安710600

出　　处：《光学学报》2021年第21期50-56,共7页Acta Optica Sinica

基　　金：国家自然科学基金青年项目(61701384);陕西省教育厅重点科学研究计划项目(20JS051);西安工程大学柯桥纺织产业创新研究院项目(19KQYB03)。

摘　　要：针对传统机械光栅周期不可调、检测精度低、无法实现光谱的连续扫描等问题,提出了一种基于石墨烯(GNP)和聚二甲基硅氧烷(PDMS)构成的复合材料的低压直流电驱动可调谐纳米光栅,并对光栅整体结构进行了设计。利用COMSOL Multiphysics软件研究了光栅结构尺寸和驱动电压对光栅周期和膜层温度的影响规律。分析结果表明,在低电压驱动下膜层最大温度变化约为160℃,光栅周期在5 s内的最大调谐量为160 nm。此外,在不同的驱动电压下,光栅周期和膜层温度的变化规律是相似的,这满足了工业气体的不同检测需求。Aiming at the problems of traditional mechanical gratings,such as unadjustable period,low detection accuracy and inability to realize continuous spectral scanning,a low-voltage direct current driven tunable nanograting based on composite material made of graphene(GNP)and polydimethylsiloxane(PDMS)is proposed,and the overall structure of grating is designed.The effects of grating structure size and driving voltage on grating period and film temperature are studied by using COMSOL Multiphysics software.The analysis results show that the maximum temperature change of film is about 160℃and the maximum tuning amount of grating period is 160 nm within 5 s under low-voltage driving.Moreover,the changing laws of grating period and film temperature are similar under different driving voltages,which meets the different detection requirements for industrial gases.

关 键 词：光栅 纳米光栅 石墨烯 电热驱动 光栅周期 

分 类 号：TB332[一般工业技术—材料科学与工程]