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作 者:王亚琴 刘兴刚 付海涛 安希忠 刘涛 WANG Ya-qin;LIU Xing-gang;FU Hai-tao;AN Xi-zhong;LIU Tao(School of Materials Science&Engineering,Northeastern University,Shenyang 110819,China;School of Metallurgy,Northeastern University,Shenyang 110819,China)
机构地区:[1]东北大学材料科学与工程学院,辽宁沈阳110819 [2]东北大学冶金学院,辽宁沈阳110819
出 处:《仪表技术与传感器》2021年第12期18-22,27,共6页Instrument Technique and Sensor
基 金:国家自然科学基金资助项目(51974072);中央高校基本科研业务费专项资金资助项目(N2125028)。
摘 要:以Zn(CH_(3)COOH)_(2)·2H_(2)O为锌源,Co(NO_(3))_(2)·6H_(2)O为钴源,PVP充当软模板,乙二醇为溶剂,通过一步溶剂热法成功制备出平均粒径为3μm的ZnO-Co_(3)O_(4)复合微球,采用XRD、SEM、TEM、XPS对材料的物相、微观形貌和显微结构以及元素价态进行表征与分析,将ZnO-Co_(3)O_(4)复合微球组装成半导体气敏元件进行气敏性能研究。结果表明,ZnO-Co_(3)O_(4)复合微球传感器的最佳操作温度为130℃,此温度下该传感器对100 ppm正丁醇的灵敏度为114.69,是纯ZnO传感器的18.3倍。该传感器对正丁醇的最低检测限可达5 ppm,对5~200 ppm正丁醇具有良好的线性关系。ZnO-Co_(3)O_(4) composite microspheres with an average grain diameter of 3μm were synthesized by an one-step sol-vothermal method based on Zn(CH_(3)COOH)_(2)·2H_(2)O as zinc source,Co(NO_(3))_(2)·6H_(2)O as cobalt source,PVP as soft template,and ethylene glycol as solvent.The phase,microstructure,morphology and element valence were characterized with XRD,SEM,TEM and XPS.The gas sensing performances of the ZnO-Co_(3)O_(4) composite microspheres were researched through assembling into semiconductor gas sensor.The results show that the ZnO-Co_(3)O_(4) composite microspheres⁃based sensor displays a sensitivity of 114.69 to 100 ppm n-butanol at the optimal operating temperature of 130℃,which is 18.3 times higher than that of pure ZnO-based sensor.The minimum detection limit of the sensor for n-butanol reaches 5 ppm,and the sensor has a good linear relationship from 5 to 200 ppm n-butanol.
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