气敏材料表征的悬臂梁微称重温控系统设计  

Design of Cantilever Microweighing Temperature Control System Characterized by Gas Sensitive Material

作　　者：陆天海 费超 徐大诚[1] 于海涛[2] LU Tian-hai;FEI Chao;XU Da-cheng;YU Hai-tao(Research Center of Micro-nano Sensor Technology,Soochow University,Suzhou 215006,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,State Key Lab of Transducer Technology,Shanghai 200050,China)

机构地区：[1]苏州大学微纳传感技术研究中心,江苏苏州215006 [2]中国科学院上海微系统与信息技术研究所,传感技术国家重点实验室,上海200050

出　　处：《仪表技术与传感器》2021年第12期81-86,共6页Instrument Technique and Sensor

基　　金：国家重大科研仪器研制项目(61527818)。

摘　　要：针对传统气敏材料表征实验中微悬臂梁称重装置存在温控系统体积大、能效比低及升降温速度慢等问题。文中设计了采用双层帕尔贴结构的微型温控腔体,拓宽了温度控制范围,减小了温控腔体体积。同时提出高精度自校准温度测量电路和模糊自适应PID控制算法,提高了温度控制速度和精度。实验结果表明:该系统控温范围可达-40~180℃,温控稳定性为±0.05℃,最大升温速度为40℃/min,最大降温速度为-20℃/min,完全满足基于微悬臂梁的气敏材料吸脱附性能分析对温度变化的要求。In view of the problems of micro⁃cantilever weighing device in the gas sensing material characterization experi⁃ment,such as large volume of temperature control system,low energy efficiency ratio and slow speed of temperature rise and fall,in this paper,a micro temperature control cavity with double Peltier structure was designed,which widened the temperature control range and reduced the volume of temperature control cavity.At the same time,a high⁃precision self calibration temperature measuring circuit and a fuzzy adaptive PID control algorithm were proposed to improve the speed and accuracy of temperature control.The experimental results show that the temperature control range of the system can reach-40~180℃,the temperature control stability is±0.05℃,the maximum heating speed is 40℃/min,and the maximum cooling speed is-20℃/min,which fully meets the requirements of temperature change in the analysis of gas sensing material adsorption and desorption performance based on micro cantilever.

关 键 词：气敏材料 微悬臂梁 帕尔贴 温控系统 自校准电路 模糊PID 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]