基于氧化石墨烯的微悬臂梁湿度传感器  

Microcantilever humidity sensor based on graphene oxide

作　　者：薛长国[1] 周宁鸿 王启明 冯贺 李建军[1] XUE Changguo;ZHOU Ninghong;WANG Qiming;FENG He;LI Jianjun(School of Materials Science and Engineering,Anhui University of Technology,Huainan 232001,China)

机构地区：[1]安徽理工大学材料科学与工程学院,安徽淮南232001

出　　处：《传感器与微系统》2021年第12期52-55,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(11872001,12172002);安徽省自然科学杰出青年科学基金资助项目(1808085J30);安徽省重点研究与开发计划项目(202004h07020026);安徽省留学回国人员创新项目。

摘　　要：利用铜环辅助涂覆法在微悬臂梁表面涂覆了氧化石墨烯(GO)作为湿度敏感层,研究了传感器在不同相对湿度(RH)下位移偏转变化。GO薄膜吸水膨胀和失水收缩引起微悬臂梁挠度变化,利用光杠杆检测原理将微悬臂梁自由端位移偏转量放大,得到传感器位移偏转与湿度关系。结果表明:传感器在18%~77%RH的范围内,湿度变化量与位移偏转量的线性相关度为0.993 6,灵敏度约为82.93 nm/%RH;并在连续4次相对湿度为20%~77%RH的循环测试中,传感器偏转趋势基本一致,具有良好的重复性,且传感器的响应时间为5 s,恢复时间为10 s。传感器具有响应时间快、重复性好等优点,在微型湿度传感器中具有潜在应用前景。Graphene oxide(GO) film as humidity sensitive layer is fabricated on the surface of the microcantilever by copper ring auxiliary coating method.The displacement deflection change of the sensor under different relative humidity(RH) are studied.The water-absorbing expansion and water-loss shrinkage of the GO film cause the deflection of the microcantilever to change.The optical lever detection principle is used to amplify the displacement deflection of the free end of the microcantilever to obtain the relationship between the displacement deflection of the sensor and the humidity.The results show that linear correlation between humidity change and displacement deflection is 0.993 6 in relative humidity measurement range of 18 %~77 %RH, and the sensor sensitivity is about 82.93 nm/%RH.Four consecutive cycle tests show that the trend of the sensor is the same and displays good measurement repeatability in relative humidity measurement range of 20 %~ 77 %RH.Deflection trend of sensor is basically the same.The response time of sensor is 5 s and the recovery time is 10 s.The sensor has the advantages of fast response and good repeatability.It has potential application prospects in miniature humidity sensors.

关 键 词：微悬臂梁 氧化石墨烯 湿度传感器 辅助涂覆法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]