基于微结构的柔性电容式压力传感器设计与仿真研究  

Study on flexible capacitive pressure sensor based on microstructure design and simulation

作　　者：侯丽娟 秦会斌[1] 胡炜薇[1] HOU Lijuan;QIN Huibin;HU Weiwei(School of Electronic Information,Hangzhou Dianzi University,Hangzhou 310018,China)

机构地区：[1]杭州电子科技大学电子信息学院,浙江杭州310018

出　　处：《传感器与微系统》2021年第12期66-68,72,共4页Transducer and Microsystem Technologies

基　　金：浙江省科技计划资助项目(2017C01027)。

摘　　要：设计了一种基于聚二甲基硅氧烷(PDMS)和氧化碳纳米管材料的柔性电容式压力传感器。针对柔性传感器加工工艺复杂和结构等问题,在提高传感器性能指标的基础上,降低制作成本,简化制作工艺过程。传感器采用三明治结构,在上电极层中加入棱锥体微结构,采用丝网印刷工艺将导电材料印刷至柔性基底上,制备PDMS薄膜作为中间介电层,下电极铺设平滑的导电材料。基于微结构,在受到压力时,更容易发生形变,因此传感器的灵敏度会更高。经过对棱锥体微结构的仿真,结果表明:在压力作用下,采用微结构时传感器发生形变量更大。此方法制备的传感器具有成本低、工艺简单、灵敏度高等特点,在医疗健康检测和智能穿戴等方面有广阔的应用前景。A kind of flexible capacitive pressure sensor based on polydimethylsiloxane(PDMS) and oxidized carbon nanotubes is designed, aiming at complex processing technology and structure of the flexible sensor, and on the basis of improving performance index of the sensor, the manufacturing cost is reduced and the manufacturing process is simplified. The sensor adopts sandwich structure, pyramid microstructure is added into the upper electrode layer, the conductive material is printed onto the flexible substrate by Sike screen printing process, PDMS film is prepared as intermediate dielectric layer. The lower electrode is laid with smooth conductive material. Based on the microstructure, it is more likely to deform under pressure, so the sensor will be more sensitive. The simulation results of the pyramid microstructure show that the shape variation of the sensor is larger when the microstructure is used under pressure. The sensor made by this method has the characteristics of low cost, simple process and high sensitivity, and has a broad application prospect in medical health detection and intelligent wearing.

关 键 词：微结构 柔性压力传感器 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]