一体式光纤光栅三维加速度传感器  

Integrated Fiber Grating Three-Dimensional Acceleration Sensor

作　　者：郭永兴 陈敏 熊丽 周兴林 李聪 Guo Yongxing;Chen Min;Xiong Li;Zhou Xinglin;Li Cong(Key Laboratory of Metallurgical Equipment and Control Technology,Ministry of Education,Wuhan University of Science and Technology,Wuhan,Hubei 430081,China;Hubei Key Laboratory of Mechanical Transmission and Manufacturing Engineering,Wuhan University of Science and Technology,Wuhan,Hubei 430081,China;Institute of Robotics and Intelligent Systems,Wuhan University of Science and Technology,Wuhan,Hubei 430081,China)

机构地区：[1]武汉科技大学冶金装备及其控制教育部重点实验室,湖北武汉430081 [2]武汉科技大学机械传动与制造工程湖北省重点实验室,湖北武汉430081 [3]武汉科技大学机器人与智能系统研究院,湖北武汉430081

出　　处：《激光与光电子学进展》2021年第21期77-86,共10页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(52075397,51827812);湖北省自然科学基金创新群体项目(2020CFA033);武汉市科技计划项目(2019010702011308)。

摘　　要：提出了一种基于光纤光栅(FBG)的一体式三维加速度传感器。该传感器以十字梁为弹性体,采用有限元分析方法研究了弹性体的应变分布特征,5个光纤光栅按照特定的规则被封装在梁的表面。通过将两两组合的光纤光栅波长漂移量的差值作为传感器不同振动方向的输出信号,实现三维加速度的低耦合测量及温度补偿。振动测试结果表明,该传感器在x、y和z方向的谐振频率分别为2000,1920,1160 Hz,工作频带分别为20~1400 Hz、20~1300 Hz和10~800 Hz,在x、y和z方向的灵敏度分别为1.36,1.70,1.31 pm/g。该传感器具有良好的线性度、弱耦合性和温度补偿能力。An integrated three-dimensional acceleration sensor based on fiber Bragg grating(FBG)was presented in this paper.The sensor took the cross-beams as the elastomer,and the strain distribution characteristics of the elastomer were studied by using the finite element analysis method.Five FBGs were encapsulated on the surfaces of the beams according to specific rules.The difference of wavelength shifts of pairwise FBGs was used as the output signal of the sensor in different vibration directions to realize low coupling measurement of three-dimensional acceleration and temperature compensation.The vibration test results show that:the resonant frequencies of the sensor in the x,y,and z directions are 2000,1920,and 1160 Hz,respectively;the operating frequency bands are 20‒1400 Hz,20‒1300 Hz,and 10‒800 Hz,respectively;the sensitivities in the x,y,and z directions are 1.36,1.70,and 1.31 pm/g,respectively.Moreover,the sensor has good linearity,weak coupling,and temperature compensation capability.

关 键 词：光纤光学 三维加速度传感器 光纤光栅 

分 类 号：TN253[电子电信—物理电子学] TP212.1[自动化与计算机技术—检测技术与自动化装置]