SC切石英晶体谐振器的等效电感一致性分析  

Analysis of Consistency of Equivalent Inductance of SC Cut Quartz Crystal Resonator

作　　者：郭建 李鹏 杨晓雷 逄杰[1] GUO Jian;LI Peng;YANG Xiaolei;PANG Jie(The 13th Institute of China Electronic Technology Group Corporation,Shijiazhuang 050051,China;Hebei Bowei Integrated Circuits Co., Ltd, Shijiazhuang 050299,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051 [2]河北博威集成电路有限公司,河北石家庄050299

出　　处：《压电与声光》2021年第6期753-756,共4页Piezoelectrics & Acoustooptics

摘　　要：SC切石英晶体谐振器是恒温晶振的核心器件,但生产中发现高频SC切石英晶体谐振器的等效电感存在与理论值偏差、一致性差的问题。该文提出了石英晶体谐振器等效电感的计算模型,并系统仿真了生产中可能影响等效电感一致性的因素。仿真结果表明,电极厚度、微调量和微调斑偏移对等效电感的一致性影响不大,而晶片的平行度是影响等效电感一致性的关键,该结论有助于提高SC切石英晶体谐振器的指标和一致性。The SC cut quartz crystal resonator is a key element of oven controlled crystal oscillator.However,it was found in manufacturing that the equivalent inductance of the SC cut quartz crystal resonators working on high frequencies are faced with the problems of deviation from the theoretical value and poor consistency.The paper presented a method to calculate the equivalent inductance of quartz crystal resonators and systematically analyzed the underlying factors that could potentially contribute to this inconsistency.The simulation results showed that the electrode thickness,the trimming thickness,or the trimming eccentricity had little effect on the consistency of the equivalent inductance,but the parallelism of the crystal blank was the key to the consistency of the equivalent inductance.The conclusion can help to improve the product uniformity in the manufacture of SC cut quartz crystal resonators.

关 键 词：SC切谐振器 晶片平行度 电极 等效电感 能陷理论 

分 类 号：TN753.9[电子电信—电路与系统]