MEMS压电指向性传声器仿真与性能优化  

Simulation and Performance Optimization of MEMS Piezoelectric Directional Microphone

作　　者：翟禹光 李俊红[1] 樊青青 王文[1] ZHAI Yuguang;LI Junhong;FAN Qingqing;WANG Wen(Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2021年第6期830-833,839,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11874388)。

摘　　要：为提高微机电系统(MEMS)压电指向性传声器的声压灵敏度,该文采用有限元法对一种MEMS压电指向性传声器进行了仿真与性能优化。对于该压电指向性传声器结构的声压灵敏度随压电层材料种类、厚度及长度的变化进行了研究,优化了结构参数,提高了器件的灵敏度及信噪比。结果表明,当硅梁厚为10μm,压电层厚为6.3μm时,器件灵敏度达到最大,较先前结构提高了约14 dB。In order to improve the sound pressure sensitivity of the micro-electro-mechanical system(MEMS)piezoelectric directional microphone,its performance is simulated and optimized by using the finite element method in this paper.The variation of sound pressure sensitivity of the piezoelectric directional microphone structure with the change of the piezoelectric layer material type,thickness and length is studied,the structural parameters are optimized,and the sensitivity and signal-to-noise ratio of the device are improved.The results show that when the thickness of the silicon beam is 10μm and the thickness of the piezoelectric layer is 6.3μm,the sensitivity of the device reaches the maximum,which is about 14 dB higher than that of the previous structure.

关 键 词：有限元方法 微机电系统(MEMS)压电指向性传声器 压电结构 灵敏度 特征频率 

分 类 号：TN384[电子电信—物理电子学]