Additive Manufacturing of Metal Micro-ring and Tube by Laser-Assisted Electrophoretic Deposition with Laguerre-Gaussian Beam  

作　　者：Kenta Nakazawa Syunya Ozawa Futoshi Iwata 

机构地区：[1]Graduate School of Integrated Science and Technology,Shizuoka University,3-5-1 Johoku.Naka-ku,Hamamatsu 432-8561.Japan [2]Graduate School of Medical Photonics,Shizuoka University,3-5-1 Johoku,Naka-ku,Hamamatsu 432-8011,Japan [3]Research Institute of Electronics,Shizuoka University,3-5-1 Johoku,Naka-ku,Hamamatsu 432-8011,Japan

出　　处：《Nanomanufacturing and Metrology》2021年第4期271-277,共7页纳米制造与计量（英文）

基　　金：This study was supported by JSPS KAKENHI Grant Number JP20H0244 from the Ministry of Education,Culture,Sports,Science,and Technology of Japan.

摘　　要：We report a method for laser-assisted electrophoretic deposition using a Laguerre-Gaussian beam for maskless patterning of metal rings and tubes.These are structures of utmost importance,particularly in photonic devices.Metal nanoparticles,which are gathered in a colloidal solution by a laser trapping technique,are deposited on a substrate via electrophoresis.The deposition pattern is dependent on the focused spot shape during laser trapping.The intensity distribution of the Laguerre-Gaussian beam is ring-shaped.Rings with different inner diameters can be fabricated by varying the topological charge of the Laguerre-Gaussian beam.The equivalent inner diameters of the deposited rings with topological charges of 1,3,and 5 were 0.30,0.78,and 1.45μm,respectively.The inner diameter of the deposited ring with a topological charge of 1 was smaller than the wavelength of the laser beam(532 nm).A tube was also fabricated with a topological charge of 3 by vertical displacement of the deposition cell.The deposition technology developed here using Laguerre-Gaussian beam will contribute to advancements in the fabrication of photonic and nano-fluidic devices.

关 键 词：Additive manufacturing Laguerre-Gaussian beam Laser trapping Maskless fabrication Electrophoretic deposition 

分 类 号：TN2[电子电信—物理电子学]