Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis  

作　　者：Tian-Long Li Zheng Wei Wei-Shi Wan 李天龙;魏征;万唯实(School of Physical Science and Technology,Shanghai Tech University,Shanghai 201210,China;College of Materials Science and Engineering,Chongqing University,Chongqing 401331,China)

机构地区：[1]School of Physical Science and Technology,Shanghai Tech University,Shanghai 201210,China [2]College of Materials Science and Engineering,Chongqing University,Chongqing 401331,China

出　　处：《Chinese Physics B》2021年第12期334-338,共5页中国物理B（英文版）

基　　金：Project supported by the Shanghai Tech University and the National Natural Science Foundation of China(Grant No.11774039)。

摘　　要：A novel instrument that integrates reflection high energy electron diffraction(RHEED),electron energy loss spectroscopy(EELS),and imaging is designed and simulated.Since it can correlate the structural,elemental,and spatial information of the same surface region via the simultaneously acquired patterns of RHEED,EELS,and energy-filtered electron microscopy,it is named correlative reflection electron microscopy(c-REM).Our simulation demonstrates that the spatial resolution of this c-REM is lower than 50 nm,which meets the requirements for in-situ monitoring the structural and chemical evolution of surface in advanced material.

关 键 词：reflection high energy electron diffraction(RHEED) electron energy loss spectroscopy(EELS) parallel detection energy-filtered electron microscopy 

分 类 号：TN16[电子电信—物理电子学]