磷化氢气体标准物质的研制  

Development of phosphine gas reference material

作　　者：刘沂玲[1] 阮俊[2] 张绍旺[2] 李士良[1] 杜雯[2] 刘月 LIU Yiling;RUAN Jun;ZHANG Shaowang;LI Shiliang;DU Wen;LIU Yue(National Institute of Metrology,Beijing 100018,China;Yunnan Institute of Measuring and Testing Technology,Kunming 650228,China)

机构地区：[1]中国计量科学研究院,北京100018 [2]云南省计量测试技术研究院,云南昆明650228

出　　处：《中国测试》2021年第12期64-72,共9页China Measurement & Test

摘　　要：该文主要介绍瓶装2.00×10^(-6)~10.0×10^(-6) mol/mol、10.0×10^(-6)~50.0×10^(-6) mol/mol、50.0×10^(-6)~100.0×10^(-6) mol/mol,3种氮气中磷化氢气体标准物质的研制过程。以磷化氢高纯气体为原料,采用称量法制备定值,使用激光光谱分析仪对其均匀性和稳定性进行检验。结果表明,该标准物质的均匀性和稳定性符合F检验和t检验的要求,其定值的相对扩展不确定度分别为3.0%、2.0%、1.5%,有效期为12个月。该标准物质获得国家二级气体标准物质证书,编号为GBW(E)084016、GBW(E)084017、GBW(E)084018。This paper introduces the development process of three kinds of standard substances of phosphine gas in nitrogen gas in bottles 2.00×10^(-6)–10.0×10^(-6) mol/mol,10.0×10^(-6)–50.0×10^(-6) mol/mol,50.0×10^(-6)–100.0×10^(-6) mol/mol.The high purity phosphine gas was used as raw material,and its uniformity and stability were tested by laser spectrometric analyzer.The results show that the uniformity and stability of the standard substance meet the requirements of F test and T test,and the relative extended uncertainty of its fixed value is 3.0%,2.0%and 1.5%,respectively,and the validity period is 12 months.The standard substance has been awarded the National GradeⅡGas Standard substance Certificate,and the Numbers are GBW(E)084016,GBW(E)084017,GBW(E)084018.

关 键 词：磷化氢气体 气体标准物质 称量法 不确定度 

分 类 号：TB9[一般工业技术—计量学]