光学干涉法半球动压马达球径检测仪  

A Ball Diameter Measuring Instrument Based on Optical Interferometry for Hemisphere Dynamic Pressure Motors

作　　者：段荣[1] 王静 岳春国[1] 董清宇 DUAN Rong;WANG Jing;YUE Chunguo;DONG Qingyu(Beijing Institute of Aerospace Control Devices,Beijing 10039,China)

机构地区：[1]北京航天控制仪器研究所,北京100039

出　　处：《计量科学与技术》2021年第12期55-59,共5页Metrology Science and Technology

摘　　要：半球动压马达的球形偶件(即半球和球碗)由于精度高,其加工过程中的球径和球度检测必须依靠高精度三坐标仪和圆度仪,检测过程繁琐、复杂、耗时、低效,成为长期以来半球动压马达制造过程中最大的效率瓶颈之一。本文介绍了一种基于光的干涉原理研制而成的球径检测装置。工程应用表明:该装置具有操作简便、精度高和结果直观等优点,并可实现零件加工时的在位检测,极大地提高了检测效率,对提高半球动压马达乃至所有球形零件的制造效率具有重要意义。As the precision of the spherical couple parts(i.e.the hemisphere and the ball bowl)of a hemisphere dynamic pressure motor is very high,their ball diameter and sphericity measurement during fabricating process have to rely on high precision three-dimensional and roundness measuring instruments.Therefore the measuring process is tedious,complicated,time-consuming,and inefficient.For a long time,it has been one of the bottlenecks that reduce efficiency in the manufacture of hemisphere dynamic pressure motors.In this paper,a ball diameter measuring instrument developed on the basis of the principal of optical interference is introduced.Its application showed that it featured simple operation,high precision,and visible results.It can be used for in-situ measurement while the parts are under fabrication,which greatly improves the measurement efficiency.It has great potential for increasing the efficiency of manufacture of hemisphere dynamic pressure motors and other spherical parts as well.

关 键 词：半球动压马达 光学干涉 干涉光圈 球径 球度 

分 类 号：TH89[机械工程—仪器科学与技术]