PDMS基光子器件的耦合光栅与波导研究  

PDMS⁃based grating coupler and waveguide for planar photonic devices

作　　者：刘启发[1] 张琳[2] 赵子岳 胡金高娃 宾璟橦 成谢锋[2] LIU Qifa;ZHANG Lin;ZHAO Ziyue;HU Jingaowa;BIN Jingtong;CHENG Xiefeng(College of Telecommunications&Information Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210003,China;College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学通信与信息工程学院,江苏南京210003 [2]南京邮电大学电子与光学工程、微电子学院,江苏南京210023

出　　处：《南京邮电大学学报（自然科学版）》2021年第6期18-22,共5页Journal of Nanjing University of Posts and Telecommunications：Natural Science Edition

基　　金：中国博士后科学基金(2018M640507);南京邮电大学自然科学基金(NY218046)资助项目。

摘　　要：基于柔性材料聚二甲基硅氧烷(PDMS)的优异特性,面向紫外和可见光波段进行光子器件基础研究和设计。通过单模波导以消除模间传输损耗,基于布拉格条件的数值解析和有限元仿真优化设计耦合光栅结构,实现了光栅刻蚀比为0.9、周期为570 nm的峰值损耗为6 dB的单模波导集成型耦合光栅。结果表明,基于PDMS的芯片光子结构可以实现低损耗波导传输和高效波导光子获取。该工作为PDMS基柔性芯片光子集成器件奠定了理论和设计基础。Based on the excellent characteristics of flexible material polydimethylsiloxane(PDMS),a basic research and a design of PDMS photonic devices for ultraviolet and visible bands are carried out.Firstly,a single⁃mode waveguide to eliminate the inter⁃mode transmission loss is designed.Then,the grating coupler parameters are optimized based on the numerical analysis of the Bragg conditions and the finite element simulation.A integrated grating coupler for single⁃mode waveguide with 6 dB peak coupling loss is realized at 0.9 etching ratio and 570 nm period.The results show that the photonic device based on PDMS can realize low⁃loss waveguide transmission and high⁃efficiency waveguide photon acquisition.The research provides a theoretical and design basis for PDMS⁃based flexible photonic integrated devices.

关 键 词：PDMS 单模波导 耦合光栅 布拉格条件 柔性光子器件 

分 类 号：TN256[电子电信—物理电子学]