推挽式谐振加速度传感器设计及仿真研究  

Design and simulation of push-pull resonant acceleration sensor

作　　者：都捷豪 石云波[1] 李飞 赵锐[1] 曹慧亮[1] 刘翔天 DU Jiehao;SHI Yunbo;LI Fei;ZHAO Rui;CAO Huiliang;LIU Xiangtian(Key Laboratory of Science and Technology on Electronic Test&Measurement,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《传感器与微系统》2022年第1期28-31,36,共5页Transducer and Microsystem Technologies

基　　金：山西省重点研发计划资助项目(202003D111004)。

摘　　要：设计了一种基于微杠杆原理的推挽式高精度、高灵敏度的硅微谐振加速度传感器。采用微杠杆放大结构,并通过单连接梁推挽谐振器实现力放大和差分输出,具有结构对称,尺寸易于加工的特点。通过设计结构、优化尺寸,并进行模态分析、静力分析和谐响应分析来完成整个结构的设计与仿真研究。结果表明:加速度计工作谐振频率分别为21.708 kHz和21.715 kHz。在±5 g_(n)的设计量程内对结构进行了灵敏度分析。仿真结果表示,其敏感轴的灵敏度为280 Hz/g_(n),非敏感轴的横向灵敏度为0.4 Hz/g_(n)和0.1 Hz/g_(n)。最后搭建自激振荡的闭环驱动模型,验证了结构在闭环系统下的可行性。A push-pull silicon micro resonant acceleration sensor with high precision and high sensitivity,based on the principle of micro lever is designed.The micro lever magnify mechanism is adopted in this structure,and the force amplifying and differential output are realized by a single connected beam push-pull resonator.It has characteristics of symmetrical structure and easy processing.The design and simulation research of the whole structure are completed by designing the structure,optimizing the size,modal analysis,static analysis and harmonic response analysis.The results show that working resonant frequencies of the accelerometer are 21.708 kHz and 21.715 kHz,respectively.The sensitivity of the structure is analyzed in the range of±5 g_(n).The simulation results show that the sensitivity of the sensitive axis is 280 Hz/g_(n),and the transverse sensitivity of the non-sensitive axis is 0.4 Hz/g_(n) and 0.1 Hz/g_(n).Finally,the closed-loop driving model of self-excited oscillation is built to verify the feasibility of the structure in closed-loop system.

关 键 词：硅微谐振式加速度计 差分输出 有限元分析 结构设计 高灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]