微型集成光波导电场传感器的设计  

Design of Miniature Integrated Optical Waveguide Electric Field Sensor

作　　者：王欣 张家洪[1,2] 陈福深 刘斌 WANG Xin;ZHANG Jiahong;CHEN Fushen;LIU Bin(Faculty of Information Engineering and Automation,Kunming University of Science and Technology,Kunming Yunnan 650500,China;Yunnan Key Laboratory of Computer Technology Application,Kunming University of Science and Technology,Kunming Yunnan 650500,China;Beijing Safety Test Technology Co.,Ltd.,Beijing 102209,China)

机构地区：[1]昆明理工大学信息工程与自动化学院,云南昆明650500 [2]昆明理工大学云南省计算机应用技术重点实验室,云南昆明650500 [3]北京森馥科技股份有限公司,北京102209

出　　处：《传感技术学报》2021年第11期1445-1450,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61765009);云南省应用基础研究项目(2018FB106)。

摘　　要：针对现有测量手段对时域脉冲电场测量的不足,利用铌酸锂晶体的电光效应,设计了一种集成了光波导与锥形天线的新型电场传感器。采用退火质子交换技术与溅射法制备的集成光波导电场传感器体积为仅为70 mm×15 mm×15 mm。对该传感器的频响特性与时域动态范围进行测试,实验结果表明:传感器带宽为100 kHz至10 GHz,可测量电场范围为6.67 kV/m~133.33 kV/m,线性拟合相关系数为0.98535。与直接感应式电场传感器与电光直调电场传感器相比,集成光波导电场传感器体积更小,无需供电,无金属干扰,带宽宽,更适用于瞬态电场的测量。To solve the problem that the current existing measurement method cannot detect the time domain waveform of pulsed electric field correctly,based on the electro-optic effect of Lithium Niobate crystal,an integrated optical waveguide electric field sensor incorporated with a tapered antenna has been designed.By using the annealing proton exchange technology and the sputtering technology,the size of this sensor is only 70 mm×15 mm×15 mm.The frequency response and time domain dynamic characteristics of the sensor are tested.The experimental results show that the sensor bandwidth ranges from 100 kHz to 10 GHz,and the measurable electric field ranges from 6.67 kV/m to 133.33 kV/m.A linear fitting have been done,and the linear fitting correlation coefficient is 0.98535.Comparing with the metallic direct induction electric field sensor and the electro-optic direct-modulation electric field sensor,the developed integrated optical waveguide electric field sensor has smaller dimension,no power supply,no metal interference,and wide bandwidth.It is more suitable for measuring the pulsed electric field in the time domain.

关 键 词：电场传感器 晶体电光效应 频响测试 时域测试 频率响应 时域特性 

分 类 号：TM935[电气工程—电力电子与电力传动]