六甲基二硅胺烷与六甲基二硅氮烷间歇生产过程监控  

Monitoring for Batch Process of Hexamethyldisilane and Hexamethyldisilazane

作　　者：李智豪 陈子豪 郑年年 栾小丽 刘飞 LI Zhi-hao;CHEN Zi-hao;ZHENG Nian-nian;LUAN Xiao-li;LIU Fei(Key Laboratory for Advanced Process Control of Light Industry of the Ministry of Education,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学轻工过程先进控制教育部重点实验室,江苏无锡214122

出　　处：《控制工程》2021年第12期2451-2455,共5页Control Engineering of China

基　　金：国家自然科学基金资助项目(61473137,61722306)。

摘　　要：针对间歇生产过程具有的多批次、非线性和动态性特点等,基于多向主元分析,提出一种改进的过程监控和质量一致性方案,并在此基础上实现质量控制与生产优化。进一步以某化工厂的六甲基二硅胺烷(hexamethyldisilane,HMDZ)和六甲基二硅氮烷(hexamethyldisilazane,HMDS)间歇生产过程为例,详细阐述了其数据采集及预处理、离线建模和在线监控。在HMDZ和HMDS间歇生产过程中各批次间产品质量一致的基础上,所提方法通过对生产单耗的实时监测,实现间歇生产过程的监控与优化。For the multi-batch,nonlinear and dynamic characteristics of batch processes,a modified scheme of process monitoring and quality consistency based on multi-directional principal component analysis(MPCA)is put forward in this paper.Then,quality control and production optimization are realized.The data collection and preprocessing,offline modeling and online monitoring are elaborated by taking the batch processes of hexamethyldisilane(HMDZ)and hexamethyldisilazane(HMDS)in a chemical plant as examples.Based on the consistency of product quality among batches in the batch processes of HMDZ and HMDS,the proposed method can realize the monitoring and optimization of batch process by real-time monitoring of production unit energy consumption.

关 键 词：间歇生产过程 多向主元分析 能耗监控 过程优化 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]